Abstract:Amorphous Al2O3 doped Er2O3 films were deposited on Si(001) substrates by radio frequency magnetron sputtering technique. Emission spectra exhibit a strong emission band around 410 nm and a series of emission band near 970, 980, 1018, 1042 and 1080nm. Ellipsometry measurements show that the refractive indexof the ErAlO films in the region of 400~1000 nm is between 1.76-1.83. The reflectivity of the ErAlO on Si is much smaller than that of clean Si and pure Er2O3 films. All the results indicate that ErAlO could… Show more
Set email alert for when this publication receives citations?
scite is a Brooklyn-based organization that helps researchers better discover and understand research articles through Smart Citations–citations that display the context of the citation and describe whether the article provides supporting or contrasting evidence. scite is used by students and researchers from around the world and is funded in part by the National Science Foundation and the National Institute on Drug Abuse of the National Institutes of Health.