Study on the Influence of the Pulling Rate on the Axial and Radial Uniformity of Gallium in Czochralski Monocrystalline Silicon Crystal

Zu, Yan; Li, Shaoyuan; Lv, Guoqiang; Wan, Xiaohan; Ren, Yongsheng; Ma, Wenhui

doi:10.1007/s12633-023-02495-3

Silicon

2023

DOI: 10.1007/s12633-023-02495-3

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Study on the Influence of the Pulling Rate on the Axial and Radial Uniformity of Gallium in Czochralski Monocrystalline Silicon Crystal

Yan Zu

Shaoyuan Li

Guoqiang Lv

et al.

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Study on the Influence of the Pulling Rate on the Axial and Radial Uniformity of Gallium in Czochralski Monocrystalline Silicon Crystal

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