2018 9th IEEE Control and System Graduate Research Colloquium (ICSGRC) 2018
DOI: 10.1109/icsgrc.2018.8657518
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Study on the Grain Size of Vanadium Dioxide Thin Films using Sol-gel Spin Coating Method

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Cited by 3 publications
(1 citation statement)
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“…To make a two-tone transfer, it is necessary to separate the metal film from the top surface of the mold and the metal part at the bottom of the hole; however, in the case of silver ink, the hole is often completely filled, making separation difficult. In this study, silver ink at the top was made into a thin film by the spin-coating method [22][23][24][25] and baked to separate silver on top of the mold pattern from silver in the hole area. After removing the silver from the top of the mold with polyethylene terephthalate (PET) film, the silver at the bottom of the mold was scooped out using UV-nanoimprint lithography (UV-NIL) with UV-nanoimprint resin.…”
Section: Introductionmentioning
confidence: 99%
“…To make a two-tone transfer, it is necessary to separate the metal film from the top surface of the mold and the metal part at the bottom of the hole; however, in the case of silver ink, the hole is often completely filled, making separation difficult. In this study, silver ink at the top was made into a thin film by the spin-coating method [22][23][24][25] and baked to separate silver on top of the mold pattern from silver in the hole area. After removing the silver from the top of the mold with polyethylene terephthalate (PET) film, the silver at the bottom of the mold was scooped out using UV-nanoimprint lithography (UV-NIL) with UV-nanoimprint resin.…”
Section: Introductionmentioning
confidence: 99%