“…Due to the special properties such as excellent chemical and thermal stability, insulating property, and full compatibility with the very large scale integrated circuit (VLSI), SiO 2 has been widely used in the domains of dielectric [1,2], catalyst carrier [3,4], microelectronic materials [5], and optical waveguide [6,7]. Recently, the strong ultraviolet-visible light emissions in the Ge/SiO 2 system have been demonstrated to originate from lots of factors (defects and nc-Ge) [8][9][10][11].…”