Study on pad cutting rate and surface roughness in diamond dressing process

Pham, Quoc-Phong; Chen, Chao‐Chang A.

doi:10.1007/s12541-017-0196-z

Cited by 5 publications

(8 citation statements)

References 18 publications

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“…The RCLPS system is composed of a deformation plate, constraint plate, and control unit (Figure 1). The constraint and deformation plates are solid discs made of metals 1 and 2, respectively; their volumes are 11…”

Section: Structure and Design Principle For The Rclps Systemmentioning

confidence: 99%

A Real-Time Dressing Method for Metal Lapping Pads Based on the Thermal-Deformation Effect

Zhao

Wang

et al. 2021

Preprint

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The surface shape and accuracy of the metal lapping pad are important factors that affect the performance of the lapping process for flat optical components. A real-time control system for metal-lapping-pad surface shape (RCLPS) based on the bimetal thermal-deformation effect is proposed. Unlike traditional dressing methods (e.g., turning dressing with a diamond tool), real-time dressing based on the RCLPS system is a material-loss-free and in-process dressing method. A full-aperture lapping turntable based on the RCLPS system was designed, and the working heat was analyzed. A thermal-deformation model was established through regression analysis. Finally, experiments were conducted to verify the functionality of the RCLPS system. During turning dressing (turntable rotational speed nm = 100 rpm), the thermal-deformation error caused by the working heat of the turntable-shaft system was compensated by the RCLPS system. During the lapping process for optical elements (nm ≤ 20 rpm), the real-time dressing of the lapping-pad surface shape was controlled by the coolant temperature of the RCLPS system, permitting optimization and adjustment of the process performance of the plane optical component. The effectiveness and practicality of the RCLPS system were demonstrated experimentally.

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Section: Structure and Design Principle For The Rclps Systemmentioning

confidence: 99%

A Real-Time Dressing Method for Metal Lapping Pads Based on the Thermal-Deformation Effect

Zhao

Wang

et al. 2021

Preprint

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show abstract

“…Pham [17] verified that the roughness of the polishing pad will be greater where the grain trajectories overlap, and divided the polishing pad into multiple concentric circles, and compared the number of track coincidence points in each concentric circle to predict the polishing pad roughness distribution. Li [18] found that the intersection density of grain tracks affects the pad roughness, and the pad roughness becomes stable only when the track overlap density reaches a certain amount.…”

Section: Introductionmentioning

confidence: 99%

Characterization and dressing effect of CMP diamond disc conditioner with ordered abrasive distribution

Guo

Yang²,

Zhenhui³

et al. 2023

Preprint

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With the advent of the 5G information age, the production and processing of computer chips has attracted people's attention. In order to adapt to the rapid development in the field of chip manufacturing, high requirements are placed on chemical mechanical planarization (CMP). Among them, the porous structure on the surface of the polishing pad is easily blocked and loses its performance during the use of the polishing pad. Therefore, the use of diamond disc conditioner to dress the polishing pad in the CMP process is an indispensable part. In this paper, a new method of measuring the dressing disc is proposed, after the wax block is melted, it solidifies on the surface of the dressing disc to obtain the protrusion height of the grains, this method has more advantages than measuring with an optical microscope because of the error caused by the diffuse reflection of the microscope. For diamond conditioners used in the experiments, the dressing trajectory of abrasive grains is simulated, which is the basis on choosing the experimental method, and the material removal rate model of the polishing pad is established. In addition, the diamond conditioners with orderly distributed abrasive grains are used to dress the polishing pad after polishing silicon wafer two hours, the discs can remove the blocking material on the surface of the polishing pad after dressing 30 minutes, the dressing effect and efficiency of the diamond disc with grain size of 100µm is more obvious. The surface roughness and the liquid contact angle of the polishing pad before and after dressing are measured, after a period of conditioning, they can be restored to a state similar to that of the new polishing pad.

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“…Use of a diamond dresser is the most traditional method of dressing a lapping pad [9][10][11][12]. However, it results in material losses, reducing the pad's service life.…”

Section: Introductionmentioning

confidence: 99%

A real-time dressing method for metal lapping pads based on the thermal deformation effect

Zhao

Wang

et al. 2022

Int J Adv Manuf Technol

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The surface shape and accuracy of the metal lapping pad are important factors that affect the performance of the lapping process for flat optical components. A real-time control system for metal-lapping-pad surface shape (RCLPS) based on the bimetal thermal-deformation effect is proposed. Unlike traditional dressing methods (e.g., turning dressing with a diamond tool), real-time dressing based on the RCLPS system is a material-loss-free and in-process dressing method. A full-aperture lapping turntable based on the RCLPS system was designed, and the working heat was analyzed. A thermal-deformation model was established through regression analysis. Finally, experiments were conducted to verify the functionality of the RCLPS system. During turning dressing (turntable rotational speed n m = 100 rpm), the thermal-deformation error caused by the working heat of the turntable-shaft system was compensated by the RCLPS system. During the lapping process for optical elements (n m ≤ 20 rpm), the real-time dressing of the lapping-pad surface shape was controlled by the coolant temperature of the RCLPS system, permitting optimization and adjustment of the process performance of the plane optical component. The effectiveness and practicality of the RCLPS system were demonstrated experimentally.

show abstract

Study on pad cutting rate and surface roughness in diamond dressing process

Cited by 5 publications

References 18 publications

A Real-Time Dressing Method for Metal Lapping Pads Based on the Thermal-Deformation Effect

A Real-Time Dressing Method for Metal Lapping Pads Based on the Thermal-Deformation Effect

Characterization and dressing effect of CMP diamond disc conditioner with ordered abrasive distribution

A real-time dressing method for metal lapping pads based on the thermal deformation effect

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