Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon

Zhang, Yanming; Zhang, Zhen; Zhang, Yi; Liu, Denghua; Wu, Jie; Huang, Yu; Zhang, Guojun

doi:10.1016/j.jare.2020.12.005

Cited by 28 publications

(9 citation statements)

References 25 publications

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“…This paper aims to investigate the influence of the external magnetic field on the ablation process following ultrashort pulses. The positive effect of the external magnetic field has already been demonstrated using nanosecond [10,11], picosecond [15], and femtosecond laser pulses [12][13][14]. In our case, femtosecond laser pulses in the infrared range have been applied to investigate the effects and driving mechanisms in the micromachining of silicon surfaces with the externally applied magnetic field.…”

Section: Introductionmentioning

confidence: 81%

“…Changing the ambient atmosphere, including conditions, namely, the application of various processing gases [3] or liquid flows top layers [4][5][6], gives additional flexibility to the ablation process. Various studies have been carried out by some research groups to investigate the effect of the magnetic field on the ablation process as well [7][8][9][10][11][12][13][14][15]. However, the applied field in these studies was mainly perpendicular to the laser beam close to the surface.…”

Section: Introductionmentioning

confidence: 99%

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Magnetic-field assisted laser ablation of silicon

et al. 2021

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Understanding and manipulation of the laser processing quality during the ablation of solids have crucial importance from fundamental and industrial perspectives. Here we have studied the effect of external magnetic field on the micro-material processing of silicon by ultrashort laser pulses. It was found experimentally that such a field directed along the laser beam improves the quality and efficiency of the material removal. Additionally, we observe that the formation of laser-induced periodic surface structures (LIPSS) in a multi-pulse regime is affected by the external magnetic field. Our results open a route towards efficient and controllable ultrafast laser micromachining.

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Section: Introductionmentioning

confidence: 81%

Section: Introductionmentioning

confidence: 99%

Magnetic-field assisted laser ablation of silicon

et al. 2021

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“…In addition, for processing super-hydrophobic surfaces, EDM is mainly oriented to conductive metal materials. To potentially fabricate high-performance super hydrophobic surface, Zhang et al [ 87 ] proposed a novel micro machining technique, magnetically controlled ultrashort pulsed laser induced plasma micro-machining. Kliuev et al [ 88 ] compared the microstructure of the γ-TiAl surface processed by WEDM and die-sinking EDM, and found that these processes can be used as industrial solutions for the generation of superhydrophobic and superhydrophilic surfaces.…”

Section: Discussionmentioning

confidence: 99%

Progress in Non-Traditional Processing for Fabricating Superhydrophobic Surfaces

Shen¹,

Ming

Ren

et al. 2021

Micromachines

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When the water droplets are on some superhydrophobic surfaces, the surface only needs to be inclined at a very small angle to make the water droplets roll off. Hence, building a superhydrophobic surface on the material substrate, especially the metal substrate, can effectively alleviate the problems of its inability to resist corrosion and easy icing during use, and it can also give it special functions such as self-cleaning, lubrication, and drag reduction. Therefore, this study reviews and summarizes the development trends in the fabrication of superhydrophobic surface materials by non-traditional processing techniques. First, the principle of the superhydrophobic surfaces fabricated by laser beam machining (LBM) is introduced, and the machining performances of the LBM process, such as femtosecond laser, picosecond laser, and nanosecond laser, for fabricating the surfaces are compared and summarized. Second, the principle and the machining performances of the electrical discharge machining (EDM), for fabricating the superhydrophobic surfaces, are reviewed and compared, respectively. Third, the machining performances to fabricate the superhydrophobic surfaces by the electrochemical machining (ECM), including electrochemical oxidation process and electrochemical reduction process, are reviewed and grouped by materials fabricated. Lastly, other non-traditional machining processes for fabricating superhydrophobic surfaces, such as ultrasonic machining (USM), water jet machining (WJM), and plasma spraying machining (PSM), are compared and summarized. Moreover, the advantage and disadvantage of the above mentioned non-traditional machining processes are discussed. Thereafter, the prospect of non-traditional machining for fabricating the desired superhydrophobic surfaces is proposed.

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“…The material removal of the two processes depends on the coupling of thermal energy and the mechanical energy of the plasma [4,5]. Totally different from EDM, LIPMM can be used to machine non-conductive materials and is not restricted by wear or size of tool electrodes [6], thereby effectively improving the dimensional accuracy of the workpiece. With the expansion of the induced plasma, its resistance generates recoil pressure acting on the processing zone to cause debris splashing [7].…”

Section: Introductionmentioning

confidence: 99%

Comparative Analysis of Bubbles Behavior in Different Liquids by Laser-Induced Plasma Micromachining Single-Crystal Silicon

et al. 2022

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Laser-induced plasma micromachining (LIPMM) can be used to fabricate high-quality microstructures of hard and brittle materials. The liquid medium of the LIPMM process plays a key role in inducing the plasma and cooling the materials, but the liquid medium is overheated which induces lots of bubbles to defocus the laser beam and reduce machining stability. In this paper, a comparative investigation on bubble behavior and its effect on the surface integrity of microchannels in three types of liquids and at different depths during LIPMM has been presented. Firstly, the formation mechanism of microbubbles was described. Secondly, a series of experiments were conducted to study the number and maximum diameter of the attached bubbles and the buoyancy movement of floating bubbles in the LIPMM of single-crystal silicon under deionized water, absolute ethyl alcohol, and 5.6 mol/L phosphoric acid solution with a liquid layer depth of 1–5 mm. It was revealed that the number and maximum diameter of attached bubbles in deionized water were the highest due to its high tension. Different from the continuous rising of bubbles at the tail of the microchannels in the other two liquids, microbubbles in 5.6 mol/L phosphoric acid solution with high viscosity rose intermittently, which formed a large area of bubble barrier to seriously affect the laser focus, resulting in a discontinuous microchannel with an unablated segment of 26.31 μm. When the depth of the liquid layer was 4 mm, absolute ethyl alcohol showed the advantages in narrow width (27.15 μm), large depth (16.5 μm), and uniform depth profile of the microchannel by LIPMM. This was because microbubbles in the anhydrous ethanol quickly and explosively spread towards the edge of the laser processing zone to reduce the bubble interference. This research contributes to a better understanding of the behavior and influence of bubbles in different liquid media and depths in LIPMM of single-crystal silicon.

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Study on machining characteristics of magnetically controlled laser induced plasma micro-machining single-crystal silicon

Cited by 28 publications

References 25 publications

Magnetic-field assisted laser ablation of silicon

Magnetic-field assisted laser ablation of silicon

Progress in Non-Traditional Processing for Fabricating Superhydrophobic Surfaces

Comparative Analysis of Bubbles Behavior in Different Liquids by Laser-Induced Plasma Micromachining Single-Crystal Silicon

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