Magnetic-field assisted laser ablation of silicon

Abstract

Understanding and manipulation of the laser processing quality during the ablation of solids have crucial importance from fundamental and industrial perspectives. Here we have studied the effect of external magnetic field on the micro-material processing of silicon by ultrashort laser pulses. It was found experimentally that such a field directed along the laser beam improves the quality and efficiency of the material removal. Additionally, we observe that the formation of laser-induced periodic surface structures (LIPSS) in a multi-pulse regime is affected by the external magnetic field. Our results open a route towards efficient and controllable ultrafast laser micromachining.

Influence of a Magnetic Field on the Structure, Morphology and Gas Sensing Characteristics of ZnO: Al Thin Films Prepared by Pulsed Laser Ablation

“…The target properties highly affect the laser-induced nanostructures prepared by the PLD technique [11]. It was found experimentally that using an external magnetic field with the (PLD) technique improves the target ablation process and highly affects the formation of laserinduced nanostructures [10,12,13]. It was reported that applying a tangential magnetic field increases the surface morphology and growth rate of the formed material [14].…”