2021
DOI: 10.1142/s0217984921400200
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Study on ignition performance of tantalum nitride film energy exchangers based on new bridge area

Abstract: In order to reduce the ignition energy of the tantalum nitride film transducer, a new type of energy exchangers bridge area was designed in this paper, and it was fabricated by MEMS technology. The parameters of ignition voltage, ignition energy, as well as action time were tested. The experimental results showed that in terms of ignition voltage, ignition energy, and action time, the value of the energy exchangers element of the new bridge area was lower than the value of the energy exchangers element of the … Show more

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Cited by 7 publications
(4 citation statements)
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“…The main process was shown in Figure 2 [9][10] . The energy commutator pattern of TaN film was prepared by MEMS process.…”
Section: Figure 1 Schematic Diagram Of the Whole Tan Transducer Struc...mentioning
confidence: 99%
“…The main process was shown in Figure 2 [9][10] . The energy commutator pattern of TaN film was prepared by MEMS process.…”
Section: Figure 1 Schematic Diagram Of the Whole Tan Transducer Struc...mentioning
confidence: 99%
“…Energy exchange substrate materials and parameters are also an important aspect that affects the efficiency of energy exchange. [17][18][19] Hence, it is urgent to explore new system energy exchange technologies to improve both safety and energy exchange efficiency.…”
Section: Introductionmentioning
confidence: 99%
“…To optimize the output performance of the EC elements, micro electro-mechanical systems (MEMS) technology has been introduced into IE devices, leading to the generation of high-performance micro EC elements [ 5 , 6 , 7 ]. Micro EC element materials mainly include semiconductor bridges [ 8 , 9 , 10 ], metal material membrane bridges such as nickel–chromiums alloy [ 11 , 12 ], tantalum nitride (TaN) [ 13 , 14 ], and composite materials [ 15 , 16 , 17 ]. Among these materials, TaN is widely used because of its high stability at high temperatures, antioxidant properties, corrosion resistance, and low cost of manufacturing [ 18 , 19 ].…”
Section: Introductionmentioning
confidence: 99%