Study on frequency stability of a linear-vibration MEMS gyroscope

Wang, Wei; Tingkai, Zhang; Fan, Dongqing; Xing, Chaoyang

doi:10.1007/s00542-013-1951-4

Cited by 6 publications

(3 citation statements)

References 5 publications

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“…Generally, MEMS/MOEMS gyroscopes can be divided into electrostatic driving [17], piezoelectric driving [18], and electromagnetic driving [19], in terms of the driving methods; and can be divided into capacitance sensing [20], current sensing [21], resistance sensing [22], frequency sensing [9], and tunnel effect sensing [23], in terms of the sensing methods; and also can be divided into vibration type [24] and rotor type [25], from the structure difference. The vibration-type silicon micro-gyroscope can also be further divided into linear vibration [26] and angular vibration [27]. More specifically, according to the principles and sensitive structure, the vibration-type silicon micro-gyroscope can be divided into the double frame type [28][29][30][31][32][33][34][35][36][37][38][39][40][41], tuning fork type , micro-hemisphere resonance type [71][72][73][74][75][76][77][78][79][80][81][82][83][84][85][86], vibration ring type [87]<...…”

Section: Main Performance Indexes Of Microgyroscopementioning

confidence: 99%

MEMS and MOEMS Gyroscopes: A Review

Huang,

Yan,

Zhang

et al. 2023

Photonic Sens

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Micro-gyroscopes using micro-electro-mechanical system (MEMS) and micro-opto-electro-mechanical system (MOEMS) are the new-generation and recently well-developed gyroscopes produced by the combinations of the traditional gyroscope technology and MEMS/MOEMS technologies. According to the working principle and used materials, the newly-reported micro-gyroscopes in recent years include the silicon-based micromechanical vibratory gyroscope, hemispherical resonant gyroscope, piezoelectric vibratory gyroscope, suspended rotor gyroscope, microfluidic gyroscope, optical gyroscope, and atomic gyroscope. According to different sensitive structures, the silicon-based micromechanical vibratory gyroscope can also be divided into double frame type, tuning fork type, vibrating ring type, and nested ring type. For those micro-gyroscopes, in recent years, many emerging techniques are proposed and developed to enhance different aspects of performances, such as the sensitivity, angle random walk (ARW), bias instability (BI), and bandwidth. Therefore, this paper will firstly review the main performances and applications of those newly-developed MEMS/MOEMS gyroscopes, then comprehensively summarize and analyze the latest research progress of the micro-gyroscopes mentioned above, and finally discuss the future development trends of MEMS/MOEMS gyroscopes.

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Section: Main Performance Indexes Of Microgyroscopementioning

confidence: 99%

MEMS and MOEMS Gyroscopes: A Review

Huang,

Yan,

Zhang

et al. 2023

Photonic Sens

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“…In addition, Cao et al (2013) proposed a novel temperature compensation method for a MEMS gyroscope oriented on a periphery circuit in 2013; Wang et al (2014) studied thermal-dependent frequency stability of a linearvibration gyroscope based on elastic theory of thin plate and proposed method of changing gyroscope structure to decrease the frequency variation under different temperatures in 2014; in 2015, Chang et al (2015) proposed a suspended arch-shaped silicon thermistor to improve the performance of a triaxis vortex convective gyroscope by reducing the thermal induced stress and heat dissipation to the substrate. From above it is obvious that researchers did a lot of work to study the temperature characteristics of MEMS gyroscope, but on the other hand, most of their study did not explain the mechanism of MEMS gyroscope temperature characteristics.…”

Section: Temperature Characteristicsmentioning

confidence: 99%

Research development of silicon MEMS gyroscopes: a review

Zhang

Cheng

et al. 2015

Microsyst Technol

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“…Environmental thermal fluctuations are major issues in such devices. Several researchers have presented a temperature compensation method that changes the structure of a gyroscope to decrease frequency variation under different temperatures [9,10]. This limitation of MEMS gyroscopes remains a challenge.…”

Section: Introductionmentioning

confidence: 99%

Computational Study of a Motion Sensor to Simultaneously Measure Two Physical Quantities in All Three Directions for a UAV

Siddique

Ogami

2023

Sensors

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Cross-axis sensitivity is generally undesirable, and lower values are required for the accurate performance of a thermal accelerometer. In this study, errors in devices are utilized to simultaneously measure two physical quantities of an unmanned aerial vehicle (UAV) in the X-, Y-, and Z-directions, i.e., where three accelerations and three rotations can also be simultaneously measured using a single motion sensor. The 3D structures of thermal accelerometers were designed and simulated in a FEM simulator using commercially available FLUENT 18.2 software Obtained temperature responses were correlated with input physical quantities, and a graphical relationship was created between peak temperature values and input accelerations and rotations. Using this graphical representation, any values of acceleration from 1g to 4g and rotational speed from 200 to 1000°/s can be simultaneously measured in all three directions.

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Study on frequency stability of a linear-vibration MEMS gyroscope

Cited by 6 publications

References 5 publications

MEMS and MOEMS Gyroscopes: A Review

MEMS and MOEMS Gyroscopes: A Review

Research development of silicon MEMS gyroscopes: a review

Computational Study of a Motion Sensor to Simultaneously Measure Two Physical Quantities in All Three Directions for a UAV

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