Study of VO2 thin film synthesis by atomic layer deposition

Prasadam, Vasu Prasad; Dey, B.; Bulou, Simon; Schenk, Tony; Bahlawane, Naoufal

doi:10.1016/j.mtchem.2019.03.005

Cited by 23 publications

(19 citation statements)

References 87 publications

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“…The study of synthetic nanomaterials was driven by the prediction of novel properties derived from their nanoscale properties. In this context, carbon nanotubes (CNTs) are particularly attractive owing to their high aspect ratio and chemical stability in addition to their electronic and optical properties . CNT‐based coatings behave similar to a blackbody, an ideal material to absorb light irrespective of the angle of incidence (AOI).…”

Section: Introductioncontrasting

confidence: 99%

Thermal Chemical Vapor Deposition of Superblack Randomly Oriented Carbon Nanotube Coatings

Basheer

Baba

Bahlawane

2020

Physica Status Solidi (a)

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Multi‐walled carbon nanotubes (CNTs) are deposited via thermal chemical vapor deposition using cobalt catalyst and MgO promoter. A systematic investigation of the major processing parameters such as temperature (390–620 °C), pressure (3–10 mbar), injection (4–10 ms), and deposition times is performed. The impact of these parameters on the film density and optical properties of CNT coatings is discussed. Irrespective of the growth parameters, a homogeneous deposition of CNTs and a negligible impact on the CNTs’ quality are observed. Total hemispherical reflectance (THR) reveals a threshold thickness of 3 μm, above which the CNT films behave as an efficient black absorber in the UV–vis–near‐infrared (NIR) and mid‐infrared (MIR) spectral regions. Spatial and spectral integrations of THR show a reflection below 1% in the 250 nm–2.5 μm spectral range. The low reflection observed in the NIR is retained in the MIR up to λ = 10 μm.

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Section: Introductioncontrasting

confidence: 99%

Thermal Chemical Vapor Deposition of Superblack Randomly Oriented Carbon Nanotube Coatings

Basheer

Baba

Bahlawane

2020

Physica Status Solidi (a)

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“…Interestingly, the PTT of the annealed films is still low compared to those of the pure and bulk VO 2 (>68 °C) . The low transition temperature possibilities and methods for the VO 2 thin films have been counted above. − In addition, authors Wang et al exhibited beneficial phase transition at around 32 °C for the sputtered VO 2 thin film on the glass substrate due to the stress and strain . According to reliable measurements of Mukherjee et al, the stable PTT at 44–48 °C undoubtedly summarizes for the size effect and lattice strain .…”

Section: Resultsmentioning

confidence: 99%

“…The focus of recent theoretical and experimental research on the optoelectronic properties of VO 2 was the manipulation of the PTT. The PTT has been manipulated by various thin film synthesis methods: − − creation of internal and side defects, such as the oxygen vacancies, doping with impurities, ,,− use of a single-crystalline substrate with preferred orientations, ,, deposition of a buffer layer, , controlling the lattice constant parameters, and post-thermal treatments. − In addition, the semiconductor-to-metal phase transitions of other monoclinic M 1 and M 2 (stressed or strained, internal defected, intermediate phase) phases of VO 2 were studied . Quackenbush et al reported that the M 2 phase is more stable and transforms faster into the rutile structure than M 1 due to its large stress-free transformation, which is stable over a wide temperature range .…”

Section: Introductionmentioning

confidence: 99%

Control of Polymorphic Properties of Multivalent Vanadium Oxide Thin Films

Allabergenov

Yun

Cho

et al. 2021

ACS Appl. Electron. Mater.

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In this study, V x O y thin films were deposited on borosilicate glass substrates using direct current (DC) magnetron sputtering. The optoelectronic thermochromic properties of the resulting multiphase vanadium oxide thin films were investigated. As-deposited (at 280 °C) films were annealed at 350, 450, and 500 °C in an oxygen atmosphere for 30 min in a tube furnace to improve the crystallinity. Structural analysis indicated the formation of a mixed-phase vanadium oxide film consisting of VO2(B), V4O9, and V2O5 phases on the amorphous substrate after annealing above 350 °C. The results showed that the semiconductor-to-metallic phase transition temperature of the vanadium oxide film increased from 48 to 63 °C with increasing annealing temperatures. The sample annealed at 450 °C exhibited the highest variation in the infrared (IR) transmittance (ΔT IR = 28.42%) and the resistivity switch decreased by two orders of magnitude (1.4 × 10–1–2.3 × 10–3 Ω/cm). The thermal treatment temperature affected the width of the thermal hysteresis loop (H LW) and slope stiffness. A narrower H LW of 1.9 °C and a sharp slope stiffness of 8.74 were obtained for the sample annealed at 500 °C. The slope stiffness plays an important role in the fabrication of ultrafast tunable energy-saving smart windows and IR switches.

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“…The peak at 416 cm −1 is assigned to a V-O-V stretching vibration mode, which can be attributed to the V 6 O 13 [ 30 ]. The peak at 380 cm −1 is assigned to the monoclinic VO 2 (M1) phase, which represents the vibration mode of V-O bond [ 31 ]. The peaks located at 284 cm −1 and 197 cm −1 are assigned to the bending vibration mode of the O3-V-O2 bond [ 25 ].…”

Section: Resultsmentioning

confidence: 99%

Research on the Response Characteristics of Vanadium Pentoxide Film to the Irradiation of Ultrafast Pulsed Laser

et al. 2021

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Vanadium pentoxide (V2O5) is the most stable phase among many transition metal vanadium oxides, and has already been widely used in many fields. In this study, the morphological, structural, and optical responses of V2O5 film to ultrafast laser irradiation was investigated. The third-order nonlinear optical properties of V2O5 film were measured by common Z-scan technique, and the results showed that V2O5 film has self-defocusing and saturable absorption characteristics. The third-order nonlinear absorption coefficient and nonlinear refractive index were calculated to be −338 cm/GW and −3.62 × 10−12 cm2/W, respectively. The tunable saturated absorption with modulation depth ranging from 13.8% to 29.3% was realized through controlling the thickness of vanadium pentoxide film. V2O5 film was irradiated by ultrafast laser with variable pulse energy, and the morphological and structural responses of the V2O5 to the laser with different energy densities were investigated. The irreversible morphological and structural responses of V2O5 films to ultrafast laser irradiation was analyzed using the phase-contrast microscope and Raman spectrum. The chemical structure change from V2O5 to V6O13 was considered the main reason for refractive index modification.

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Study of VO2 thin film synthesis by atomic layer deposition

Cited by 23 publications

References 87 publications

Thermal Chemical Vapor Deposition of Superblack Randomly Oriented Carbon Nanotube Coatings

Thermal Chemical Vapor Deposition of Superblack Randomly Oriented Carbon Nanotube Coatings

Control of Polymorphic Properties of Multivalent Vanadium Oxide Thin Films

Research on the Response Characteristics of Vanadium Pentoxide Film to the Irradiation of Ultrafast Pulsed Laser

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