Cr-based coatings were prepared by cathode arc evaporation technology using N 2 and C 2 H 2 as reactive gases. Three compositions were investigated, Cr 60 N 40 , Cr 41 N 27 C 32 and Cr 67 C 33 .The present investigation is centred on the structural stability via coatings tempering up to 1000ºC, by in situ X-ray diffraction in inert atmosphere. As-deposited coatings present low order structure with a medium feature size less then 10 nm. The hexagonal β-Cr 2 N phase, characteristic of binary Cr 60 N 40 coating, was stable up to 900ºC, before recrystallization and grain growth takes place. For Cr 41 N 27 C 32 film the phase transition varies from the metastable δ-Cr(N,C) to orthorhombic chromium carbonitride Cr 3 (C x N 1-x ) 2 phase up to 800ºC and then to chromium carbide phase. No chromium nitride phases were detected in spite of the similar N and C contents after the deposition. The Cr-C coating recrystallizes into a mixture of carbide phases, mainly Cr 3 C 2 and Cr 23 C 6 after 1000ºC annealing treatment.