2015
DOI: 10.1016/j.tsf.2015.09.015
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Study of the structure of titanium thin films deposited with a vacuum arc as a function of the thickness

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Cited by 23 publications
(13 citation statements)
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“…This critical thickness was dependent on the substrate surface orientation and temperature, which was maximized at 500°C on a {110} surface. These findings, as well as additional deposited thin film studies, indicate that the criteria for FCC Ti stability are related to film thickness, surface orientation, and temperature [6][7][8][9][10][11]. FCC Ti has also been widely observed in Ti-Al, -Ni, and -Ag multilayer films, where it was found that an HCP to FCC transformation occurred during cross-sectional ion-milling/thinning of the multilayer for TEM studies.…”
Section: Introductionmentioning
confidence: 64%
“…This critical thickness was dependent on the substrate surface orientation and temperature, which was maximized at 500°C on a {110} surface. These findings, as well as additional deposited thin film studies, indicate that the criteria for FCC Ti stability are related to film thickness, surface orientation, and temperature [6][7][8][9][10][11]. FCC Ti has also been widely observed in Ti-Al, -Ni, and -Ag multilayer films, where it was found that an HCP to FCC transformation occurred during cross-sectional ion-milling/thinning of the multilayer for TEM studies.…”
Section: Introductionmentioning
confidence: 64%
“…Although the ground-state of Ti at standard conditions has a hexagonal close-packed (hcp) structure, a number of studies showed the presence of a face-centered cubic (fcc) phase in thin films 47 . Moreover, an hcp-fcc transition may be caused by increased temperature 48 .…”
Section: Thermal Background and Film Thicknessmentioning
confidence: 99%
“…The XRD patterns of the single layer Ti coatings exhibited peaks related to the hexagonal close packed (hcp) Ti crystal structure, which is commonly denoted as α phase. On the other hand, the thinnest single layer Ti coating (Ti A, see Table 2) exhibited an additional peak which could be associated with the face centered cubic (fcc) Ti phase [19]. According to previous studies [19,20], the presence of the fcc Ti phase was found to be dependent on the film thickness.…”
Section: Substrates and Coatings Characteristicsmentioning
confidence: 79%
“…On the other hand, the thinnest single layer Ti coating (Ti A, see Table 2) exhibited an additional peak which could be associated with the face centered cubic (fcc) Ti phase [19]. According to previous studies [19,20], the presence of the fcc Ti phase was found to be dependent on the film thickness. The critical thickness above which no fcc Ti was observed was estimated in ~ 0.3 µm.…”
Section: Substrates and Coatings Characteristicsmentioning
confidence: 79%