1997
DOI: 10.1143/jjap.36.3081
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Study of the Microscopic Surface Structure of a Quartz Substrate for Surface Acoustic Wave Devices

Abstract: This paper describes the results of investigating the microscopic features of a commercially available 35°-rotated Y-cut (ST-cut) quartz surface using atomic force microscopy (AFM) and X-ray diffraction analysis. X-ray diffraction analysis suggests that distortions in the peaks are due to the existence of a dislocation or plane slip near the surface, but precise analysis was impossible in this experiment. Data from AFM showed that a flat area with an interesting particle image exists on the surface… Show more

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Cited by 6 publications
(2 citation statements)
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“…AFM studies have shown that a-quartz has a flat (terraced) surface, but no detailed structural information was determined. 8,9 A LEED study of the a-quartz (001) surface gave a (1 Â 1) pattern. 10 However, again no detailed structure was inferred.…”
Section: Introductionmentioning
confidence: 99%
“…AFM studies have shown that a-quartz has a flat (terraced) surface, but no detailed structural information was determined. 8,9 A LEED study of the a-quartz (001) surface gave a (1 Â 1) pattern. 10 However, again no detailed structure was inferred.…”
Section: Introductionmentioning
confidence: 99%
“…In this study, we have considered the damaged layer on the surface of quartz substrates [13,14] as one of the causes of misalignment and kinks of SWNTs. It is known in the field of surface acoustic wave (SAW) devices that the uppermost layer of the surface of quartz substrates is damaged due to wafer preparation processes such as cutting, polishing and wrapping, and that the propagating waves generated by SAW devices can be scattered, attenuated, and dispersed because of this nonuniformity or imperfect crystallinity.…”
mentioning
confidence: 99%