Study of the Diamond Films With High Thermal Conductivity

Abstract

The scattering of phonons as main factors infuencing the thermal conductivity were analized theoretically. The thermal conductivity of diamond films was measured by means of the photothermal deflection method with an error of 5%. The effects of methane concentration and grain orientation on thermal conductivity of diamond films were studied. The results showed that (100) oriented diamond-films deposited by microwave plasma chemical vapour deposition method under low methane concentration have higher thermal conductivity.