1981
DOI: 10.1116/1.570853
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Study of the activation of nonevaporable getters

Abstract: X-ray photoelectron spectroscopy and static secondary ion mass spectroscopy study of activation mechanism of Zr-V low activation temperature nonevaporable getter films

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Cited by 17 publications
(4 citation statements)
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“…In other words, the BE difference for the Ba 4d levels between the first and the last deposition steps is -0.7 eV. Based on previous theoretical and experimental studies on the BE shifts of Ba in its metallic and oxidized forms, 12,[18][19][20][21][22][23][24][25] we attribute this monotonic decrease in BE observed during the Ba deposition on the θ-Al 2 O 3 /NiAl(100) substrate using preparation method A to the complete oxidation of the Ba layer and the formation of BaO. The Al 2p levels of the θ-Al 2 O 3 /NiAl(100) substrate also reveal significant changes during the Ba deposition/oxidation in preparation method A.…”
Section: Ba Deposition and Oxidationmentioning
confidence: 99%
“…In other words, the BE difference for the Ba 4d levels between the first and the last deposition steps is -0.7 eV. Based on previous theoretical and experimental studies on the BE shifts of Ba in its metallic and oxidized forms, 12,[18][19][20][21][22][23][24][25] we attribute this monotonic decrease in BE observed during the Ba deposition on the θ-Al 2 O 3 /NiAl(100) substrate using preparation method A to the complete oxidation of the Ba layer and the formation of BaO. The Al 2p levels of the θ-Al 2 O 3 /NiAl(100) substrate also reveal significant changes during the Ba deposition/oxidation in preparation method A.…”
Section: Ba Deposition and Oxidationmentioning
confidence: 99%
“…10,22) Thus, the formation of the mixed-phase structure of the zirconium solid solution and intermetallic compound is very important for preparing the zirconiumbased getter. The synthesized Zr 55 V 29 Fe 16 powder by the plasma arc discharge process in this study has a mixed-phase structure of the Zr, ZrH 2 , FeV and Zr(V 1-x Fe x ) 2 phases as shown in Fig.…”
Section: Resultsmentioning
confidence: 99%
“…Generally, the conventionally prepared Zr-V-Fe-based getter material, Zr 57 V 36 Fe 7 , has a mixed phase structure of -Zr and Zr(V 1-x Fe x ) 2 phases. 10,22) The Zr(V 1-x Fe x ) 2 phase was formed by the addition of Fe to ZrV 2 . For the application of the Zr-V-Fe-based alloys as a getter in vacuum technology, a high gas sorption property and a low activation temperature are needed.…”
Section: Resultsmentioning
confidence: 99%
“…In order to activate a getter, it is necessary to work at high temperature [2][3][4][5] and the activation process at high temperature and outgassing damages the devices. Extensive efforts have been made with respect to nonevaporable getters, especially by using Zr or Zr alloy.…”
Section: Introductionmentioning
confidence: 99%