Abstract:It is widely recognized that, in comparison with conventional Ar + sputter etching, Argon gas cluster ion beam (Ar-GCIB) sputtering provides mild etching of a sample surface because of its low energy per atom and lateral sputtering effect. X-ray photoelectron spectroscopy (XPS) combined with Ar-GCIB has become established as an in-depth analysis technique for organic materials. Considering such advantages, Ar-GCIB irradiation conditions were investigated for removal of organic contaminations on inorganic mater… Show more
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