Gas-dynamic sources of cluster ions for basic and applied research

Ieshkin, A. E.; Tolstoguzov, Aleksandr B.; Korobeishchikov, N. G.; Pelenovich, Vasiliy O.; Chernysh, V. S.

doi:10.3367/ufne.2021.06.038994

Cited by 18 publications

(3 citation statements)

References 251 publications

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“…Hence it has inherent measurement inaccuracies. Moreover, it is more suitable for molecular beams rather than for jets 18 . Infrared absorption imaging can only be applied to certain gases which have significant absorption in a particular range.…”

Section: Spatial Mapping Of Low Pressure Cluster Jets Using Rayleigh ...mentioning

confidence: 99%

Spatial mapping of low pressure cluster jets using Rayleigh scattering

Patel

Geethika

Thomas

et al. 2023

Sci Rep

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In this work, we report evolution of atomic clusters in a highly under-expanded supersonic jet of Argon. A high resolution and sensitive Rayleigh scattering based experimental set-up is designed to overcome the limitations encountered in conventional set-ups. Further, the measurement range could be extended from a few nozzle diameters to 50 nozzle diameters. Simultaneously, we had been able to generate 2D profiles of the distribution of clusters inside the jet. This paves the way to track the growth of clusters along the flow direction experimentally, which until now was limited to few nozzle diameters. The results show that spatial distribution of clusters inside the supersonic core deviates considerably from the prediction of the free expansion model. We exploit this to estimate cluster growth along the expansion direction. Further, it is observed that the growth of the clusters gets saturated after a certain distance from the nozzle. At the jet boundary, we see substantial cluster strengthening immediately upstream of barrel shock while the normal shock exhibits disintegration of clusters. These observations are noticed for the first time, which, we believe will further the understanding of cluster dynamics in a supersonic jet.

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Section: Spatial Mapping Of Low Pressure Cluster Jets Using Rayleigh ...mentioning

confidence: 99%

Spatial mapping of low pressure cluster jets using Rayleigh scattering

Patel

Geethika

Thomas

et al. 2023

Sci Rep

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“…Gas cluster ion beam (GCIB) technology and its application have made great progress in the past decades [1][2][3], including micromachining ion beam etching [4], the doping of semiconductor materials [5], ion beam assisted deposition [6], material surface smoothing and planarization [7][8][9][10], and self-assembled surface features (nanoripples) formation at off-normal irradiation [11].…”

Section: Introductionmentioning

confidence: 99%

Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment

et al. 2023

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A three-step treatment of Si wafers by gas cluster ion beam with decreasing energy was used to improve the performance of surface smoothing. First, a high energy treatment at 15 keV and an ion fluence of 2 × 1016 cm−2 was used to remove initial surface features (scratches). Next, treatments at 8 and 5 keV with the same fluences reduced the roughness that arose due to the formation of morphological features induced by the surface sputtering at the first high energy step. The surface morphology was characterized by the atomic force microscopy. The root mean square roughness Rq and 2D isotropic power spectral density functions were analyzed. For comparison, the smoothing performances of single-step treatments at 15, 8, and 5 keV were also studied. The lowest roughness values achieved for the single and three-step treatments were 1.06 and 0.65 nm, respectively.

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“…Interest in the processes of interaction of gas cluster ions with solids is due to the role that particle beams play in modern fundamental research and practical applications. Over the past two decades the gas cluster ions beams have been successfully used both for modification (ultraprecise polishing, implantation at ultra-low depths) [1][2][3][4][5], and for surface analysis by secondary ion mass spectrometry (SIMS) [6,7] or X-ray photoelectron spectroscopy (XPS) [8,9].…”

Section: Introductionmentioning

confidence: 99%

Preferential sputtering of alloys by gas cluster ions

et al. 2022

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Topography and composition of the surface of nickel-based alloys under irradiation with Ar2500+ cluster ions with the energy of 20 keV, and atomic Ar+ ions with the energy of 3 keV have been studied. It has been experimentally found that the surface of the alloys is depleted by a component with a lower binding energy. It is shown that the change in the surface concentrations of the alloy components upon irradiation with cluster ions is an order of magnitude greater than upon sputtering with atomic ions. The degree of change in the surface composition is determined by the ratio of the sputtering yields of the alloy components. Keywords: gas cluster ions, ion sputtering, XPS, preferential sputtering, surface topography.

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Gas-dynamic sources of cluster ions for basic and applied research

Cited by 18 publications

References 251 publications

Spatial mapping of low pressure cluster jets using Rayleigh scattering

Spatial mapping of low pressure cluster jets using Rayleigh scattering

Surface Smoothing by Gas Cluster Ion Beam Using Decreasing Three-Step Energy Treatment

Preferential sputtering of alloys by gas cluster ions

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