Study of structure, tribological properties and growth mechanism of DLC and nitrogen-doped DLC films deposited by electrochemical technique

Yan, Xingbin; Xu, Tao; Chen, Gang; Yang, Shengrong; Liu, Huiwen

doi:10.1016/j.apsusc.2004.05.005

Cited by 124 publications

(57 citation statements)

References 37 publications

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“…It can be observed an increase of roughness with the N 2 flow ratio increases (from 0 a 40%). This result is in agreement with previous work, [1] which shows that the surface roughness of N-DLC films tends to be higher with high N 2 flow rate in sputtering process. The increase in roughness is associated to the increase in sp 2 carbon bonds with nitrogen content increases.…”

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confidence: 95%

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Impact of high N₂flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Leal

Fraga

Rasia³

et al. 2016

Surf. Interface Anal.

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a Because of their outstanding characteristics, diamond-like carbon (DLC) thin films have been recognized as interesting materials for a variety of applications. For this reason, the effects of the incorporation of different elements on their fundamental properties have been the focus of many studies. In this work, nitrogen-incorporated DLC films were deposited on Si (100) substrates by DC magnetron sputtering of a graphite target under a variable N 2 gas flow rate in CH 4 + N 2 + Ar gas mixtures. The influence of high N 2 flow ratios (20, 40 and 60%) on the chemical, structural and morphological properties of N-DLC films was investigated. Different techniques including field emission gun-equipped scanning electron microscope (FEG-SEM), energy-dispersive X-ray spectroscopy (EDS), atomic force microscopy (AFM), profilometry, Rutherford backscattering spectrometry (RBS) and Raman spectroscopy (325-nm and 514-nm excitation) were used to examine the properties of the N-DLC films. Thus, the incorporation of nitrogen was correlated with the morphology, roughness, thickness, structure and chemical bonding of the films. Overall, the results obtained indicate that the fundamental properties of N-DLC films are not only related to the nitrogen content in the film but also to the type of chemical bonds formed.

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confidence: 95%

“…[1][2][3] This occurs because DLC is a metastable form of amorphous carbon with graphite sp 2 and diamond sp 3 hybridized bonds. [4,5] However, the high internal stress, low electrical conductivity and low thermal stability limit its use in some applications, especially as an electronic or an active sensor material.…”

Section: Introductionmentioning

confidence: 99%

Impact of high N₂flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Leal

Fraga

Rasia³

et al. 2016

Surf. Interface Anal.

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“…The curve-fitted XPS spectra of C1s in DLC films deposited in two different precursor gases of bonded with oxygen on the film surface [98]. By measuring the area of the de-convoluted sp 2 and sp 3 peaks after curve fitting, the area ratio of the peaks (I C=C /I C-C ) is determined to be 1.31 and 2.88 for DLC-M and DLC-A, respectively.…”

Section: X-ray Photoelectron Spectroscopy (Xps)mentioning

confidence: 99%

Fabrication and characterization of adherent diamond-like carbon based thin films on polyethylene terephthalate by end hall ion beam deposition

Ashtijoo

Bhattacherjee

Sutarto

et al. 2016

Surface and Coatings Technology

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The application of Polyethylene terephthalate (PET) has been steadily increasing during recent years. However, its low wear resistance, high gas permeation rate and poor biocompatibility have significantly limited its applications in some specific areas. On the contrary, diamond-like carbon (DLC) possesses many unique properties such as the high hardness, low friction coefficient, high transparency, good gas barrier, excellent biocompatibility, and low synthesis temperature, which makes it an ideal coating material for modifying the surfaces of PET for applications as food and beverage containers and biomedical implants. Nevertheless, the adhesion of DLC on PET is poor due to the high stress induced by ion bombardment during DLC deposition and the large mechanical property mismatch between the coating and the substrate. Therefore, it is very important to develop techniques to lower the stress of DLC and to enhance the adhesion strength of DLC to PET.In the present thesis work, low energy end-hall (EH) ion source and element (N and Si) doping were used to deposit DLC to lower its internal stress and ion beam treatment was performed to modify the surface of PET to enhance the adhesion between DLC and PET. In addition, two different hydrocarbon gases (CH 4 and C 2 H 2 ) were used as precursors for DLC deposition in order to understand the effect of precursor gas. The structure and properties of the treated PET and deposited DLC films were characterized by various advanced techniques: The adhesion of DLC to PET was assessed using scratch testing; the composition and bonding states of DLC and treated PET were analyzed by Raman spectroscopy, Fourier transform infrared spectroscopy (FTIR), X-ray photoelectron spectroscopy (XPS), and near edge X-ray absorption fine structure (NEXAFS); the hardness and Young's modulus were measured by nano-indentation; the tribological properties of the coated materials were evaluated by pin-on-disk sliding testing; and the surface tomography and surface roughness were investigated by atomic force microscopy and N forms sp 3 C-N and sp 2 C=N bonds in the films. Consequently, the hardness values decrease from 11.5 GPa for pure DLC to 7.0 GPa for N-DLC samples whereas the hardness of Si-DLC increases with increasing the silicon content. In addition, N doping can reduce residual stress of DLC and thus increases adhesion of DLC. The DLC films deposited using methane show better properties than using acetylene. By optimizing the conditions, dense, smooth, and adhesive DLC films have been deposited onto PET using EH ion source by combining N doping and O ion treatment with methane as precursor gas.iv AKNOWLEDGEMENTS

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“…The C1s peak of the film deposited from C 2 H 2 /He can be fitted into four components around 284.4 eV, Figure 5 (a)). The one around 284.4 eV corresponds to sp 2 C-C bonds, that around 285.2 eV corresponds to sp 3 C-C bonds, that around 286.5 eV corresponds to C-O bonds, and that around 289.2 eV corresponds to C=O bonds [7][8][9]. For the film deposited from C 2 H 2 /N 2 , a new C1s peak near 287.1 eV assigned to C-N bonds was observed ( Figure 5 (b)).…”

Section: Introductionmentioning

confidence: 99%

“…From these results, we found that the film deposited from C 2 H 2 /N 2 contained nitrogen elements assigned to dilution gas and that C-N bonds were formed in the films. Many researchers reported that nitrogen incorporated a-C:H (or DLC) films are softer with a rougher surface compared with a-C:H films (or DLC) by AP-PECVD process or electron cyclotron resonance (ESR) plasma CVD process [3,7,10]. Kodama et al reported the C-N structures are likely to prevent carbon atoms from forming three-dimensional carbon structures as for the N 2 dilution gas, resulting in a reduction of the film density.…”

Section: Introductionmentioning

confidence: 99%

Effect of dilution gas on hardness of hydrogenated amorphous carbon-based films synthesized by atmospheric pressure plasma enhanced CVD

Noborisaka

Tachimoto

Horikoshi

et al. 2013

J. Phys.: Conf. Ser.

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Study of structure, tribological properties and growth mechanism of DLC and nitrogen-doped DLC films deposited by electrochemical technique

Cited by 124 publications

References 37 publications

Impact of high N₂flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Impact of high N₂flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Fabrication and characterization of adherent diamond-like carbon based thin films on polyethylene terephthalate by end hall ion beam deposition

Effect of dilution gas on hardness of hydrogenated amorphous carbon-based films synthesized by atmospheric pressure plasma enhanced CVD

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Study of structure, tribological properties and growth mechanism of DLC and nitrogen-doped DLC films deposited by electrochemical technique

Cited by 124 publications

References 37 publications

Impact of high N2flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Impact of high N2flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Fabrication and characterization of adherent diamond-like carbon based thin films on polyethylene terephthalate by end hall ion beam deposition

Effect of dilution gas on hardness of hydrogenated amorphous carbon-based films synthesized by atmospheric pressure plasma enhanced CVD

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Impact of high N₂flow ratio on the chemical and morphological characteristics of sputtered N-DLC films

Impact of high N₂flow ratio on the chemical and morphological characteristics of sputtered N-DLC films