Study of porous silicon, silicon carbide and DLC coated field emitters for pressure sensor application

Kleps, I.; Angelescu, A.; Samfirescu, N.; Gil, Adriana; Correia, A.

doi:10.1016/s0038-1101(01)00148-4

Cited by 25 publications

(9 citation statements)

References 7 publications

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“…[187][188][189] Micro-and meso-PSi could also be used as isolation material for radio-frequency (rf) applications because of its high resistivity and compatibility with modern very-largescale-integration IC technology. 190 The list of possible applications is not yet exhausted; there are many more possible applications of porous semiconductors covered in the reviews, 4,12,27,30,32,38,153,157,171,[191][192][193][194][195][196][197] which we will not address here. This includes the many possible applications of macroporous Si, which has a few outstanding properties on its own.…”

Section: Fields Of Porous Si Applicationsmentioning

confidence: 99%

Silicon Porosification: State of the Art

Korotcenkov

Cho

2010

Critical Reviews in Solid State and Materials Sciences

149

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Section: Fields Of Porous Si Applicationsmentioning

confidence: 99%

Silicon Porosification: State of the Art

Korotcenkov

Cho

2010

Critical Reviews in Solid State and Materials Sciences

149

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“…According to this principle, the residual gas density is estimated by the current of ions produced by ionization of the gas with an electron flow with known parameters. The usually employed heated thermionic electron source should be replaced with a cold field cathode with a nanocarbon emissive coating [1][2][3][4]. Such replacement would yield enhanced reliability, vast reduction of energy consumption and practically zero turn-on time.…”

Section: General Scheme Of the Gaugementioning

confidence: 99%

Orbitron-type vacuum gauge with nanocarbon field cathode

Архипов

Gabdullin

Mishin

2015

St. Petersburg Polytechnical University Journal: Physics and Ma

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A novel electron-optical scheme of ionization-type vacuum gauge is proposed that allows the use of field-emission nanocarbon cathodes. The developed gauge satisfies the requirements imposed by possible utilization in on-board satellite equipment: low mass, size and energy consumption, low turn-on time, etc. High efficiency and sensitivity of the sensor are achieved by the use of an electrostatic trap for accumulation of electrons ionizing the gas molecules. Magnetic field was not used for mass economy reason and to avoid possible influence onto other on-board equipment. The main problem solved in the work originated from the intrinsic contradiction between the aims of achieving long-term confinement of electrons in the trap and focusing of the applied electric field at the cathode, the latter being necessary to utilize the phenomenon of field-induced emission. Experimental tests were performed with two prototype devices realizing different versions the electron-scheme design, viability of both developed schemes has been confirmed.

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“…Presence of gas particles influence vibrations of such microelements as miniature diaphragms, springs or cantilevers, decreasing their sensitivity and changing operating frequency. Ultra high vacuum is necessary in microdevices like fieldemission electron sources, electron microscopes, and mass spectrometers [3]. In these devices sufficiently long free path of electrons or ions is a critical parameter.…”

Section: Vacuum Memsmentioning

confidence: 99%

Vacuum microdevices

Grzebyk¹,

Górecka-Drzazga²

2012

Bulletin of the Polish Academy of Sciences: Technical Sciences

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Abstract. In the paper MEMS-type microsystems working in vacuum conditions are described. All the benefits and drawbacks of vacuum generated in microcavities are discussed. Different methods are used to produce vacuum in microcavity of MEMS. Some bonding techniques, sacrificial layer method or getter materials are presented. It is concluded that the best solution would be to invent some kind of vacuum micropump integrated with MEMS structure. Few types of already existing vacuum micropumps are shown, but they are not able to generate high vacuum. As the most promising candidate for miniaturization an orbitron pump was selected. The working principle and novel concepts of its construction are described. The most important part of the micropump, used for gas ionization, is a field-emission electron source. Results of a research on a lateral electron source with gold emissive layer for integration with a micropump are presented.

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Study of porous silicon, silicon carbide and DLC coated field emitters for pressure sensor application

Cited by 25 publications

References 7 publications

Silicon Porosification: State of the Art

Silicon Porosification: State of the Art

Orbitron-type vacuum gauge with nanocarbon field cathode

Vacuum microdevices

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