Study of poly(vinylidene fluoride) radiative modification using core level spectroscopy

Brzhezinskaya, M. M.; Morilova, V. M.; Байтингер, Е. М.; Evsyukov, S. E.; Песин, Л. А.

doi:10.1016/j.polymdegradstab.2013.11.009

Cited by 20 publications

(19 citation statements)

References 18 publications

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“…The main features in the C 1s absorption spectra ( Fig. 2 ) can be attributed as follows: 25,26 which overlaps with the wide signal at about 292 eV, which can be assigned to a typical transition. 25,27 The second π transition labeled as may be caused by two effects.…”

Section: Resultsmentioning

confidence: 91%

“…2) can be attributed as follows: 25,26 C 1s/p * a C]C ð285:0 eVÞ; C 1s/ p * C]O ð288:2 eVÞ; and C 1s/s * CÀF ð294:7 eVÞ which overlaps with the wide signal at about 292 eV, which can be assigned to a typical C 1s/s * CÀC transition. 25,27 The second p transition labeled as C 1s/p * b C]C ð286:6 eVÞ may be caused by two effects. The rst would be an unfolding of the energy levels of C (1s) due to the presence of two different carbon bonds linked to O and S atoms.…”

Section: Resultsmentioning

confidence: 99%

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EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer

et al. 2018

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Section: Resultsmentioning

confidence: 91%

Section: Resultsmentioning

confidence: 99%

EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer

et al. 2018

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“…Figure C shows the results of repeated measurements at the same radiating point of the pellet (2 × scan, 25 min/scan). Although the possibility of sample damage by continuous X‐ray radiation has been reported especially under synchrotron radiation, causing defluorination of polyvinylidene fluoride, the C 1s spectra in the repeated measurement were identical in this study. This indicates that damage of the HM structure with synchrotron irradiation was negligible.…”

Section: Resultsmentioning

confidence: 51%

Development of sample preparation technique to characterize chemical structure of humin by synchrotron‐radiation–based X‐ray photoelectron spectroscopy

Pham

Miyata

Awata

et al. 2018

Surface & Interface Analysis

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Carbon-binding state of humin (HM, a non-conductive insoluble organo-mineral humic substance) was successfully characterized for the first time by synchrotronradiation-based X-ray photoelectron spectroscopy (XPS). Four sample preparation techniques-HM on double-sided carbon tape, indium sheet, copper mesh, and in pellet formed from the mixture of HM and copper powder (Cu) at different mixing ratios (1:1, 1:2, and 1:6 v/v)-were compared. The results show that HM samples prepared using the first three methods had significant charge buildup, which made the interpretation of the XPS spectra impossible because of the shifts in the binding energy of C 1s XPS spectra. Pellets of HM:Cu mixture enhanced the electrical conductivity and reduced charge buildup on the sample surface. Pellets prepared with HM:Cu ratio of 1:1 (v/v) provided the minimum charge buildup and high sensitivity with difference in C 1s spectra regardless of the observing position. The C 1s spectra, estimated by the subtraction of the carbon contamination in Cu, showed the resolution of C¼C (284.0 eV), C-C/C-H (285.1 eV), C-O (286.3 eV), C¼O (287.3 eV), and O¼C-O (288.3 eV) and three additional peaks of CF (289.3 eV), CF 2 (290.2 eV), and CF 3 (291.4 eV). Soft X-ray absorption spectroscopic (XAS) analysis further proved the existence of fluoride (F 1s) in HM structure. The detection of fluorinated carbon in HM showed a great advancement of XPS compared with other conventionalanalyses. X-ray with the incident angle of 0°provided the smallest (nearly negligible) energy shift in the C 1s spectra of HM and did not damage the surface of the sample.

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“…The wide signal at about 293.5 eV can be assigned to a typical C 1s → σ* C−C transition that it is overlapped by a main C 1s → σ* C−F transition. 20,21 Finally, a shoulder at about 284.4 eV can be ascribed to the C 1s(C−SO 3 ) → π* transition. 26 The O 1s spectra (Figure 2, right) has a lower number of electronic transitions than the C 1s spectra.…”

Section: ■ Results and Discussionmentioning

confidence: 99%

Selective Fragmentation of Radiation-Sensitive Novel Polymeric Resist Materials by Inner-Shell Irradiation

Chagas

Satyanarayana

Kessler

et al. 2015

ACS Appl. Mater. Interfaces

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Two key concepts in extreme ultraviolet lithography (EUVL) are important for it to be a candidate for the mass production of future integrated circuits: the polymer formulation and the photofragmentation process. In this work, both concepts were carefully studied. The design and synthesis of radiation-sensitive organic polymeric materials based on the inclusion of a radiation-sensitive tetrahydrothiophenium functional group are outlined. A 1-(4-methacryloyoxy)naphthalene-1-yl)tetrahydro-1H-thiophenium trifluoromethanesulfonate (MANTMS) monomer containing the tetrahydrothiophenium group undergoes homo- and copolymerizations using free-radical polymerization with a 2,2'-azobis(isobutyronitrile) initiator. The surface photodegradation and oxidation of these novel polymeric materials were investigated using highly monochromatized soft X-rays from synchrotron radiation at the carbon K-edge excitation region. An efficient functionalization was observed when the excitation energy was tuned to C 1s → π*C═C. A high rate of defluorination and a loss of sulfonated groups as a result of an increase in the irradiation time for the MANTMS homopolymer thin films were mainly observed under the π*C═C excitation of the naphthyl functional groups. On the contrary, excitation similar to C 1s → π*C═O or C 1s → σ*C-F did not produce important degradation, showing a highly selective process of bond breaking. Additionally, the presence of methyl methacrylate copolymer in the original MANTMS yielded a much higher degree of stability against inner-shell radiation damage. Our results highlight the importance of choosing the right polymer formulation and excitation energy to produce a sensitive material for EUVL without using the concept of chemical amplification.

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Study of poly(vinylidene fluoride) radiative modification using core level spectroscopy

Cited by 20 publications

References 18 publications

EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer

EUV photofragmentation study of hybrid nonchemically amplified resists containing antimony as an absorption enhancer

Development of sample preparation technique to characterize chemical structure of humin by synchrotron‐radiation–based X‐ray photoelectron spectroscopy

Selective Fragmentation of Radiation-Sensitive Novel Polymeric Resist Materials by Inner-Shell Irradiation

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