Study of metal assisted anisotropic chemical etching of silicon for high aspect ratio in crystalline silicon solar cells

Lee, Youngseok; Kim, Hee Seok; Hussain, Shahzada Qamar; Han, Sangmyung; Balaji, Nagarajan; Lee, Youn-Jung; Lee, Jeahyung; Yi, Junsin

doi:10.1016/j.mssp.2015.07.011

Cited by 12 publications

(5 citation statements)

References 19 publications

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“…Also the material removal patterns, even for the much simpler planar silicon geometries are a matter of controversial debates. [56,61,[73][74][75][76] In fact, it appeared to us that one important aspect has been completely ignored so far in the MACE literature, namely a potential attraction of the AgNP to the silicon oxide that is forming at the AgNP/silicon interface. Since the pH value in the MACE process is larger than the isoelectric point of silica (pH iso =3.9), the Si-OH groups of this interface are partially deprotonated.…”

Section: Evolution Of Hierarchical Porosity In Macroporous Silicon By...mentioning

confidence: 99%

Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation

Gries¹,

Brinker²,

Zeller‐Plumhoff³

et al. 2023

Small

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Many biological materials exhibit a multiscale porosity with small, mostly nanoscale pores as well as large, macroscopic capillaries to simultaneously achieve optimized mass transport capabilities and lightweight structures with large inner surfaces. Realizing such a hierarchical porosity in artificial materials necessitates often sophisticated and expensive top‐down processing that limits scalability. Here, an approach that combines self‐organized porosity based on metal‐assisted chemical etching (MACE) with photolithographically induced macroporosity for the synthesis of single‐crystalline silicon with a bimodal pore‐size distribution is presented, i.e., hexagonally arranged cylindrical macropores with 1 µm diameter separated by walls that are traversed by pores 60 nm across. The MACE process is mainly guided by a metal‐catalyzed reduction–oxidation reaction, where silver nanoparticles (AgNPs) serve as the catalyst. In this process, the AgNPs act as self‐propelled particles that are constantly removing silicon along their trajectories. High‐resolution X‐ray imaging and electron tomography reveal a resulting large open porosity and inner surface for potential applications in high‐performance energy storage, harvesting and conversion or for on‐chip sensorics and actuorics. Finally, the hierarchically porous silicon membranes can be transformed structure‐conserving by thermal oxidation into hierarchically porous amorphous silica, a material that could be of particular interest for opto‐fluidic and (bio‐)photonic applications due to its multiscale artificial vascularization.

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Section: Evolution Of Hierarchical Porosity In Macroporous Silicon By...mentioning

confidence: 99%

Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation

Gries¹,

Brinker²,

Zeller‐Plumhoff³

et al. 2023

Small

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“…Both processes have different etching rates which depend on the material properties of the sample. The most common application of anistropic wet etching method is applied for the fabrication of crystalline materials [38,39]. The etching rate varies base on the plane of the crystalline material and the concentrations of the etchants.…”

Section: Chemical Wet Etchingmentioning

confidence: 99%

Selection of micro-fabrication techniques on stainless steel sheet for skin friction

et al. 2016

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This review gives a concise introduction to the state-of-art techniques used for surface texturing, e.g., wet etching, plasma etching, laser surface texturing (LST), 3D printing, etc. In order to fabricate deterministic textures with the desired geometric structures and scales, the innovative texturing technologies are developed and extended. Such texturing technology is an emerging frontier with revolutionary impact in industrial and scientific fields. With the help of the latest fabrication technologies, surface textures are scaling down and more complex deterministic patterns may be fabricated with desired functions, e.g., lotus effect (hydrophobic), gecko feet (adhesive), haptic tactile, etc. The objective of this review is to explore the surface texturing technology and its contributions to the applications.

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“…Alkali hydroxide etchants, ammonium hydroxide etchants, and reactive ion etching using acidic etchants are mainly used for Si wafer etching prior to solar cell fabrication [11]. Alkali etchants are anisotropic in nature whereas acidic etchants are isotropic [12]. Chemical etching is an inexpensive and easy way to implement with minimal facilities.…”

Section: Introductionmentioning

confidence: 99%

Enhancing multi-crystalline silicon wafer performance through surface modification and AZO treatment

Krishnan,

Guruswamy,

Bhargav

et al. 2023

Surface Engineering

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In the current work, we studied the influence of surface modification on reflectivity and minority carrier lifetime of mc-Si wafer taken from ingot grown by DS process. Two etchants combination namely, KOH/IPA/DI water, and NaOCl/KOH/IPA/DI water are used for different time durations. Reflectance and minority carrier lifetime vary significantly for both etchants used in this work. Optimised micro pyramidal structure formation will aid in enhancing the total internal reflection thereby increasing light absorption. Increase in minority carrier lifetime will be helpful in increasing the efficiency of solar cell. In order to establish the effect of etching on reflectivity of wafers, Al-doped ZnO was sputtered on etched surface and reflectivity was found to decrease further as observed from the reflectivity spectrum. I-V measurements were carried out on Ag/Ti/AZO/mc-Si/Ag and effect of etching on contact behaviour was observed. AZO-coated Si surface with optimised surface micro pyramids served as a good antireflection layer..

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Study of metal assisted anisotropic chemical etching of silicon for high aspect ratio in crystalline silicon solar cells

Cited by 12 publications

References 19 publications

Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation

Wafer‐Scale Fabrication of Hierarchically Porous Silicon and Silica by Active Nanoparticle‐Assisted Chemical Etching and Pseudomorphic Thermal Oxidation

Selection of micro-fabrication techniques on stainless steel sheet for skin friction

Enhancing multi-crystalline silicon wafer performance through surface modification and AZO treatment

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