Study of LGS crystal micro-resonators using flexure mode: Temperature-compensated cuts

Douchet, G.; Sthal, F.; Bigler, E.; Bourquin, R.

doi:10.1109/freq.2008.4623014

Cited by 7 publications

(2 citation statements)

References 12 publications

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“…LGS [5] GaPO 4 [5] LGT [5] θ It has been shown that temperature-compensated cuts exist for GaPO 4 , LGS and LGT LERs [7][8][9]. A similar study also proving the existence of temperature-compensated cuts was done for the flexure-mode [10]. The fact that there are temperature-compensated cuts at room temperature makes Langasite an interesting material for a scanning microdeformation microscopy use.…”

Section: Principle Of the Scanning Microdeformation Microscopymentioning

confidence: 90%

Resonant LGS microsensor for scanning microdeformation microscopy

Douchet

Sthal

Bigler

et al. 2009

2009 IEEE International Ultrasonics Symposium

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Scanning microdeformation microscopy (SMM) is a near field microscopy in the mesoscopic domain. Such a microscope has become an alternative to the high resolution acoustic microscope that operates at very high frequencies. SMM is based on a vibrating contact tip and piezoelectric detection. The lateral resolution is essentially related to the tip diameter. Classically, the SMM sensor is obtained by a complex mounting process. The tip is glued on a Si cantilever driven by a piezoelectric ceramic. Piezoelectric crystal is an alternative to get a monolithic vibrating cantilever. Quartz crystal, which is the most often used piezoelectric material, can be advantageously replaced by Langasite crystal because of its higher piezoelectric coefficients and its better temperature behaviour.

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Section: Principle Of the Scanning Microdeformation Microscopymentioning

confidence: 90%

Resonant LGS microsensor for scanning microdeformation microscopy

Douchet

Sthal

Bigler

et al. 2009

2009 IEEE International Ultrasonics Symposium

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“…For the flexure mode, the angles of the temperaturecompensated cuts for an X-cut are θ = -6.5° and θ = 62.2° [13]. In this case the resonant frequencies are:…”

Section: A Temperature-compensated Cuts For Resonatorsmentioning

confidence: 98%

Chemically etched resonant LGS microsensors

Douchet

Medeira

Sthal

et al. 2010

2010 IEEE International Frequency Control Symposium

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Materials like langasite (LGS), langatate (LGT) or gallium orthophosphate (GaPO 4 ) crystals have higher piezoelectric coefficients and also have a better hightemperature behaviour than quartz crystal. Thus they are worth being considered as a replacement for quartz in applications such as oscillators, piezoelectric accelerometers, microbalances or clocks. Length-extension resonators have already been manufactured using quartz crystal in order to get atomicallyresolved imaging by frequency-modulation atomic force microscopy. The goal of this study is to obtain better results with langasite. It has been shown that LGS-crystal microsensors should have a sensitivity three times better than quartz crystal ones. This fact added to the existence of temperaturecompensated cuts for the extensional mode of vibration is of prime importance for applications such as microcantilevers for frequency-modulation atomic force microscopes. This paper focuses on the fabrication of Langasite resonators with different cut angles around the temperature-compensated cuts both in length-extension and flexure mode.

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