LGS and GaPO4 piezoelectric crystals: New results

Traon, O. Le; Masson, Stève; Chartier, C.; Janiaud, D.

doi:10.1016/j.solidstatesciences.2009.06.032

Cited by 24 publications

(13 citation statements)

References 22 publications

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“…= + (2) The quality factor associated with electrodes Q visc can be expressed as follows according to [3].…”

Section: A Linear Kelvin Voigt Model At Low Frequenciesmentioning

confidence: 99%

“…The width of each electrode is noted w e and the evaporated gold layer thickness is h e (0.2 µm). Considering from [3] that η Au ≈ 2000 Pa.s (experimental value obtained for a flexural resonator at 8800 Hz), the values of Q visc deduced are described in the following table. The value for a one faced X-cut is calculated for information purpose only, since this configuration won't allow a proper actuation of the device.…”

Section: A Linear Kelvin Voigt Model At Low Frequenciesmentioning

confidence: 99%

“…Using the viscosity measured in [3] predicts a very poor quality factor for the LEM. Such values would be prohibitive for time and frequency applications.…”

Section: A Linear Kelvin Voigt Model At Low Frequenciesmentioning

confidence: 99%

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Gold thin film viscoelastic losses of a length extension mode resonator

Bourgeteau-Verlhac¹,

Lévy²,

Perrier³

et al. 2016

2016 European Frequency and Time Forum (EFTF)

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In [1] we presented a new length extension mode (LEM) piezoelectric micro-resonator. Thanks to a specific design, anchor losses were lowered to maximize the Q.f product and the resonator. Viscous fluid damping is neglected since the resonator is under vacuum and so is the thermoelastic damping for a length extension mode. With a Q predicted over one million the resonator is well suited for MEMS oscillator devices. Nevertheless it appears that one remaining loss source was not evaluated through our previous work: the viscoelastic damping arising from the presence of gold electrodes on the resonator surface. To investigate the influence of the gold thin film on this new resonator, we studied several papers on the quality factor of gold coated resonators and deduced a frequency dependence of the viscoelastic behavior of the gold thin film. This dependence shows that the damping for the LEM resonator won't be as important as firstly predicted and is compliant for time and frequency applications. Furthermore, the damping can be reduced to improve the quality factor with new electrode designs. These designs shall also provide low motional resistances in order not to deteriorate the phase noise far from the carrier. Two different approaches are compared to reduce electrode damping for the LEM resonator: contactless electrodes and partial electrode coating on the resonator surface. It appears that both approaches are interesting regarding the available processing technologies and give promising phase noise predictions.

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“…= + (2) The quality factor associated with electrodes Q visc can be expressed as follows according to [3].…”

Section: A Linear Kelvin Voigt Model At Low Frequenciesmentioning

confidence: 99%

Section: A Linear Kelvin Voigt Model At Low Frequenciesmentioning

confidence: 99%

See 1 more Smart Citation

Gold thin film viscoelastic losses of a length extension mode resonator

Bourgeteau-Verlhac¹,

Lévy²,

Perrier³

et al. 2016

2016 European Frequency and Time Forum (EFTF)

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“…However, the maximum operating temperature of LN-based piezoelectric devices, restricted by their low electrical resistivity (a requirement of >10 6 Ohm· cm was proposed for comparison, where the materials with low resistivity yet can be used for high frequency applications [1]) at elevated temperature is limited to <600 °C, though the Curie temperature is above 1150 °C [5]. Other important trigonal piezoelectric crystals include the langasite family with the general formula of A 3 BC 3 D 2 O 14 [6][7][8][9][10][11][12] and gallium orthophosphate GaPO 4 , in the point group of 32 [13][14][15][16][17][18][19], these crystals were reported to show modest piezoelectric coefficients (5-7 pC/N) and high melting points (1300-1500 °C for langasite family crystals and ~1670 °C for GaPO 4 ), prior to which, there are no phase transitions observed for langasite family crystals (the phase transition for GaPO 4 is about 970 °C). However, the costly component Ga 2 O 3 restricted their further implements.…”

Section: Open Accessmentioning

confidence: 99%

“…For verification, the experimental shear piezoelectric d 35 values measured from rotated crystal cuts (ZXw)θ (θ = −60°, −30°, 30° and 60°) were plotted and found to be in good agreement with the calculations, from which, the maximum d 35 value was determined to be on the order of 6.4 pC/N for (ZXw)−55° crystal cuts. In addition, different d 35 curves plotted by presuming the opposite sign of the related piezoelectric coefficients in Equation (19) Figure 7, where piezoelectric d 31 was selected for verifications by measuring the transverse extensional modes of different (ZXw)θ crystal cuts (θ = −60°, −45°, −30°, 30° and 60°). The piezoelectric coefficients were determined by Equations (9)- (11), and the results were plotted in Figure 7.…”

Section: Determination Of the Sign Of The Piezoelectric Coefficientsmentioning

confidence: 99%

Rare-Earth Calcium Oxyborate Piezoelectric Crystals ReCa4O(BO3)3: Growth and Piezoelectric Characterizations

Duan

Zhang

et al. 2014

Crystals

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Rare-earth calcium oxyborate crystals, ReCa 4 O(BO 3 ) 3 (ReCOB, Re = Er, Y, Gd, Sm, Nd, Pr, and La ), are potential piezoelectric materials for ultrahigh temperature sensor applications, due to their high electrical resistivity at elevated temperature, high piezoelectric sensitivity and temperature stability. In this paper, different techniques for ReCOB single-crystal growth are introduced, including the Bridgman and Czochralski pulling methods. Crystal orientations and the relationships between the crystallographic and physical axes of the monoclinic ReCOB crystals are discussed. The procedures for dielectric, elastic, electromechanical and piezoelectric property characterization, taking advantage of the impedance method, are presented. In addition, the maximum piezoelectric coefficients for different piezoelectric vibration modes are explored, and the optimized crystal cuts free of piezoelectric cross-talk are obtained by rotation calculations.

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