Study of electrostatic actuated MEMS biaxial scanning micro-mirror with comb structure

Sadhukhan, Dhrubajyoti; Singh, Gajendra Prasad

doi:10.1063/5.0019578

Cited by 9 publications

(2 citation statements)

References 4 publications

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“…A common method is to utilize the serpentine torsional bars design, which increases the length of the bar and, subsequently, decreases torsional stiffness. For instance, Sadhukhan [12] fabricated a comb-drive electrostatic actuator with a square micromirror measuring 5 mm × 5 mm, while Xiao et al from Northwestern Polytechnical University produced an array of electrostatic micromirrors [13]. In both cases, they utilized serpentine torsional bars to effectively reduce the driving voltage.…”

Section: Micromirror Designmentioning

confidence: 99%

A Method for Improving Heat Dissipation and Avoiding Charging Effect for Cavity Silicon-on-Glass Structures

Wang¹,

Hu²,

Liu³

et al. 2023

Preprint

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Anode bonding is a widely used method for fabricating devices with suspended structures, and this approach is often combined with deep reactive ion etching (DRIE) for releasing the device. However, the DRIE process with a glass substrate can potentially cause two critical issues: heat accumulation on the suspended surface and charging effects resulting from the reflection of charged particles from the glass substrate. In particular, for torsional bars with narrow width, the heat accumulated on the suspended surface may not dissipate efficiently, leading to photoresist burning and subsequently resulting in the fracture of the torsional bars. Moreover, once etching is finished through the silicon diaphragm, the glass surface becomes charged, and incoming ions are reflected towards the back of the silicon, resulting in the etching of the back surface. To address these issues, we proposed a method of growing silicon oxide on the back of the device layer. By designing, simulating, and fabricating electrostatic torsional micromirrors with common cavity silicon-on-glass (SOG) structures, we successfully validated the feasibility of this approach. This approach ensures effective heat dissipation on the suspended surface, even when the structure is over-etched for an extended period, and enables the complete etching of torsional bars without adverse effects due to the overheating problem. Additionally, the oxide layer can block ions from reaching the glass surface, thus avoiding the charging effect commonly observed in SOG structures during DRIE.

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Section: Micromirror Designmentioning

confidence: 99%

A Method for Improving Heat Dissipation and Avoiding Charging Effect for Cavity Silicon-on-Glass Structures

Wang¹,

Hu²,

Liu³

et al. 2023

Preprint

View full text Add to dashboard Cite

show abstract

“…Electromagnetic micromirrors can achieve high speed scanning and large driving force, but external magnets are typically needed, which will cause the form factor relatively large [ 7 , 8 ]. Electrostatic micromirrors can realize high speed scanning with low power consumption but need high drive voltage [ 9 ]. Piezoelectric micromirrors consume low power and requires only moderately high driving voltage but have limited scanning range [ 10 ].…”

Section: Introductionmentioning

confidence: 99%

Review of Electrothermal Micromirrors

Tang

et al. 2022

Micromachines

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Electrothermal micromirrors have become an important type of micromirrors due to their large angular scanning range and large linear motion. Typically, electrothermal micromirrors do not have a torsional bar, so they can easily generate linear motion. In this paper, electrothermal micromirrors based on different thermal actuators are reviewed, and also the mechanisms of those actuators are analyzed, including U-shape, chevron, thermo-pneumatic, thermo-capillary and thermal bimorph-based actuation. Special attention is given to bimorph based-electrothermal micromirrors due to their versatility in tip-tilt-piston motion. The exemplified applications of each type of electrothermal micromirrors are also presented. Moreover, electrothermal micromirrors integrated with electromagnetic or electrostatic actuators are introduced.

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Stability analysis of quasicrystal torsion micromirror actuator based on the strain gradient theory

2022

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Study of electrostatic actuated MEMS biaxial scanning micro-mirror with comb structure

Cited by 9 publications

References 4 publications

A Method for Improving Heat Dissipation and Avoiding Charging Effect for Cavity Silicon-on-Glass Structures

A Method for Improving Heat Dissipation and Avoiding Charging Effect for Cavity Silicon-on-Glass Structures

Review of Electrothermal Micromirrors

Stability analysis of quasicrystal torsion micromirror actuator based on the strain gradient theory

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