Study of electrode structures for 5.89 GHz A1 mode Lamb wave resonators to achieve fs×kt2×Q &gt; 247×109 Hz

Zhao, Jicong; Zhang, Aoyu; Sun, Xinyi; Dang, Yanmeng; Cao, Yi; Sun, Haiyan; Shi, Quan

doi:10.1016/j.mejo.2023.106007

Cited by 3 publications

(2 citation statements)

References 23 publications

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Section: Elimination Of Spurious Modes With Supporting Pillarssupporting

confidence: 91%

“…This leads to a reduced influence from the edge structure of the resonator, ultimately decreasing the proportion of energy loss in the acoustic wave. A similar result was also reported by [22]. Subsequently, the Q values of these resonators are extracted, and Figure 7 presents a comparison of the Q values of the resonators with and without pillar-supported structures across different P. When the electrode periodicity or inter-electrode spacing is relatively small, a minor portion of the primary mode may leak into the substrate in addition to the spurious modes, causing the Q values of the resonator with a pillar-supported structure to be lower than that of the resonator with a suspended-plate structure.…”

Section: Elimination Of Spurious Modes With Supporting Pillarssupporting

confidence: 91%

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Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures

Zhang,

Jiang,

Tang

et al. 2024

Micromachines

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The piezoelectric thin film composed of single-crystal lithium niobate (LiNbO3) exhibits a remarkably high electromechanical coupling coefficient and minimal intrinsic losses, making it an optimal material for fabricating bulk acoustic wave resonators. However, contemporary first-order antisymmetric (A1) Lamb mode resonators based on LiNbO3 thin films face specific challenges, such as inadequate mechanical stability, limited power capacity, and the presence of multiple spurious modes, which restrict their applicability in a broader context. In this paper, we present an innovative design for A1 Lamb mode resonators that incorporates a support-pillar structure. Integration of support pillars enables the dissipation of spurious wave energy to the substrate, effectively mitigating unwanted spurious modes. Additionally, this novel approach involves anchoring the piezoelectric thin film to a supportive framework, consequently enhancing mechanical stability while simultaneously improving the heat dissipation capabilities of the core.

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Section: Elimination Of Spurious Modes With Supporting Pillarssupporting

confidence: 91%

Section: Elimination Of Spurious Modes With Supporting Pillarssupporting

confidence: 91%

Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures

Zhang,

Jiang,

Tang

et al. 2024

Micromachines

View full text Add to dashboard Cite

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Study on the impact of the resonant cavity and lateral acoustic edge reflector for AlSc0.095N-based S0 mode Lamb-wave resonators

Zhao,

Sun,

Dong

et al. 2024

Microelectronics Journal

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Low temperature coefficient of frequency AlN Lamb wave resonator using groove structure between interdigital transducers

Li,

Zhou,

et al. 2024

Journal of Applied Physics

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The lithographically tunable and small size features of Lamb wave resonators (LWRs) take a bright future for their use in high frequency narrow band filters. Resonant frequency drift due to temperature variation has a large impact on the narrower passband and a temperature coefficient of frequency (TCF) closer to 0 can broaden the stable temperature range of the resonator. This paper proposes a method of etching grooves in the area of the piezoelectric layer not covered by the Interdigital transducer (IDT) electrodes to improve the temperature stability of the Lamb resonator. Through the finite element method and theoretical analysis, the phase velocity, group velocity, and TCF dispersion curve of different modes of the resonator with groove structure were determined. The reason for the change of TCF under different normalized thicknesses of AlN was explained through the conversion of the LWR from a contour mode resonator (CMR) to a Cross-Sectional Lamé Mode Resonator. Simulation and test have shown that etching grooves have the effect of reducing TCF by adjusting the electromechanical coupling coefficient. The test shows that 205 nm-depth grooves can lower the TCF of the S0 mode IDT-Open LWR from −13.3 to −5.1 ppm/°C and S1 mode from −36.8 to −9.0 ppm/°C, respectively. The TCF of S0 and S1 mode LWRs decreased by 61.7% and 75.5%, respectively, after 205 nm groove etching. The groove etching method greatly raises the temperature stability of the LWR, enabling Lamb wave filters to operate stably over a wider temperature range.

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Study of electrode structures for 5.89 GHz A1 mode Lamb wave resonators to achieve fs×kt2×Q > 247×109 Hz

Cited by 3 publications

References 23 publications

Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures

Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures

Study on the impact of the resonant cavity and lateral acoustic edge reflector for AlSc0.095N-based S0 mode Lamb-wave resonators

Low temperature coefficient of frequency AlN Lamb wave resonator using groove structure between interdigital transducers

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