Lithium Niobate MEMS Antisymmetric Lamb Wave Resonators with Support Structures
Yi Zhang,
Yang Jiang,
Chuying Tang
et al.
Abstract:The piezoelectric thin film composed of single-crystal lithium niobate (LiNbO3) exhibits a remarkably high electromechanical coupling coefficient and minimal intrinsic losses, making it an optimal material for fabricating bulk acoustic wave resonators. However, contemporary first-order antisymmetric (A1) Lamb mode resonators based on LiNbO3 thin films face specific challenges, such as inadequate mechanical stability, limited power capacity, and the presence of multiple spurious modes, which restrict their appl… Show more
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