Study of diffusion of impurities in semiconductor silicon by activation analysis and nuclear reaction methods

Kotas, P.; Obrusník, I.; Kvítek, J.; Hnatowicz, V.

doi:10.1007/bf02516983

Cited by 5 publications

(4 citation statements)

References 10 publications

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“…2 Pictures of (a) boron implanted silicon wafer, (b) lithium-coated silicon wafer, and (c) the lithium ion battery and its electrodes [10]. This method (prompt analysis method) is capable of calculating the depth profile quickly and intuitively; hence recent NDP researchers have also used it.…”

Section: Depth Profile Analyses Of 10 B and 6 LImentioning

confidence: 98%

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Analysis of depth profiles of 10B and 6Li in Si wafers and lithium ion battery electrodes using the KAERI-NDP system

Park

Sun

2015

J Radioanal Nucl Chem

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A neutron depth profiling system has been setup at HANARO, a 30 MW research reactor at the Korea Atomic Energy Research Institute. Silicon wafers containing 10 B or 6 Li, and electrode films from lithium ion batteries were irradiated with cold neutrons to test the performance and demonstrate the applications of the system. Depth profiles of 10 B and 6 Li were determined for each sample. The determined depth profiles were compared with reference values obtained by secondary ion mass spectroscopy. Peak depth, peak concentration, and aerial density agreed with the reference values to within 2, 6, and 11 % respectively.

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Section: Depth Profile Analyses Of 10 B and 6 LImentioning

confidence: 98%

“…As shown in Fig. 5a, 10 B is distributed to a depth of 0.5 lm for the BSi-1 sample and 0.3 lm for the BSi-2 sample. Figure 5b shows the analysis results for the BSi-3 sample.…”

Section: Depth Profile Analyses Of 10 B and 6 LImentioning

confidence: 99%

Analysis of depth profiles of 10B and 6Li in Si wafers and lithium ion battery electrodes using the KAERI-NDP system

Park

Sun

2015

J Radioanal Nucl Chem

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“…For unfolding of the measured raw data, the determination of the detector energy response function is required. Any measured spectra S(E) is a concentration profile of an analyzed isotope C(x) convoluted with the detector response function f det (E, x) that includes possible uncertainties in measured energy and background (16)(17)(18)(19):…”

Section: Performance Of the New Ndp Spectrometer With Standard Ndp Samentioning

confidence: 99%

“…The unfolded depth profile after NDP measurement and comparison to the certified Boron distribution are shown in Figure 10. The unfolding procedure has been performed using the software developed in (16,21). Small deviations on the right shoulder are caused by the above-mentioned asymmetry in detector response function while the available software operates only with symmetric Gaussian response.…”

Section: Performance Of the New Ndp Spectrometer With Standard Ndp Samentioning

confidence: 99%

A new neutron depth profiling spectrometer at the JCNS for a focused neutron beam

Vezhlev

Ioffe

Mattauch

et al. 2020

Radiation Effects and Defects in Solids

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A new neutron depth profiling (NDP) spectrometer has been designed and built for the use at a high intensity focused cold neutron beam of the reflectometer MARIA at the Heinz Maier-Leibnitz Zentrum (MLZ, Germany). The extremely high neutron flux at the sample position of MARIA joined with the multiple charged particle detectors allows less than 10 s sampling rate and paves the way to study the kinetics of Li ions in thin-film microbatteries. The performance of the spectrometer with standard calibration samples and LiNbO 3 amorphous thin films is presented; possibilities to operando study the Li distribution inside thin-film rechargeable lithium batteries are discussed. ARTICLE HISTORY KEYWORDSNeutron depth profiling; in situ; operando methods; near-surface analysis; thin-film lithium batteries ,CONTACT E. Vezhlev

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The radioanalytical bibliography of Czechoslovakia (1936–1977)

Tölgyessy¹,

Dejmková²,

Celustková-Vázna³

1982

J. Radioanal. Chem.

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Study of diffusion of impurities in semiconductor silicon by activation analysis and nuclear reaction methods

Cited by 5 publications

References 10 publications

Analysis of depth profiles of 10B and 6Li in Si wafers and lithium ion battery electrodes using the KAERI-NDP system

Analysis of depth profiles of 10B and 6Li in Si wafers and lithium ion battery electrodes using the KAERI-NDP system

A new neutron depth profiling spectrometer at the JCNS for a focused neutron beam

The radioanalytical bibliography of Czechoslovakia (1936–1977)

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