Analysis of depth profiles of 10B and 6Li in Si wafers and lithium ion battery electrodes using the KAERI-NDP system

Abstract

A neutron depth profiling system has been setup at HANARO, a 30 MW research reactor at the Korea Atomic Energy Research Institute. Silicon wafers containing 10 B or 6 Li, and electrode films from lithium ion batteries were irradiated with cold neutrons to test the performance and demonstrate the applications of the system. Depth profiles of 10 B and 6 Li were determined for each sample. The determined depth profiles were compared with reference values obtained by secondary ion mass spectroscopy. Peak depth, peak concentration, and aerial density agreed with the reference values to within 2, 6, and 11 % respectively.