2009
DOI: 10.1016/j.vacuum.2008.12.002
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Studies on the target conditioning for deposition of LiCoO2 films

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Cited by 12 publications
(6 citation statements)
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“…Figure b shows the O 1s spectra in the LiCoO x ion-supplying layer of nonprogrammed and programmed devices. The peak at 529 eV is for lattice oxygen, while the higher binding energy peak at 531 eV could be assigned as the Li 2 O peak , or nonlattice oxygen peak. , Assuming that the peak around at 531 eV is assigned to the oxygen peak of Li 2 O, the reduced relative intensity of Li 2 O after programming is interpreted with the Li + ion escape from the LiCoO x layer, which is also consistent with the TOF-SIMS and electrical results. Also, if the peak is assigned to nonlattice oxygen, the escape of Li + ions from the LiCoO x layer would also lead to the increase of relative intensity of the lattice oxygen peak as shown in Figure b because the depletion of Li + ions increases the relative ratio of oxygen anions to metal cations.…”
Section: Resultssupporting
confidence: 79%
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“…Figure b shows the O 1s spectra in the LiCoO x ion-supplying layer of nonprogrammed and programmed devices. The peak at 529 eV is for lattice oxygen, while the higher binding energy peak at 531 eV could be assigned as the Li 2 O peak , or nonlattice oxygen peak. , Assuming that the peak around at 531 eV is assigned to the oxygen peak of Li 2 O, the reduced relative intensity of Li 2 O after programming is interpreted with the Li + ion escape from the LiCoO x layer, which is also consistent with the TOF-SIMS and electrical results. Also, if the peak is assigned to nonlattice oxygen, the escape of Li + ions from the LiCoO x layer would also lead to the increase of relative intensity of the lattice oxygen peak as shown in Figure b because the depletion of Li + ions increases the relative ratio of oxygen anions to metal cations.…”
Section: Resultssupporting
confidence: 79%
“…Figure 7b shows the O 1s spectra in the LiCoO x ionsupplying layer of nonprogrammed and programmed devices. The peak at 529 eV is for lattice oxygen, while the higher binding energy peak at 531 eV could be assigned as the Li 2 O peak 44,45 or nonlattice oxygen peak. 46,47 Assuming that the peak around at 531 eV is assigned to the oxygen peak of Li 2 O, the reduced relative intensity of Li 2 O after programming is interpreted with the Li + ion escape from the LiCoO x layer, which is also consistent with the TOF-SIMS and electrical results.…”
Section: Resultsmentioning
confidence: 99%
“…In the fabrication of LiCoO 2 thin films formation of the 2-D structure is known to be crucial for obtaining a good mobility of the lithium ions. Various aspects of LiCoO 2 thin films prepared by RF sputtering [6][7][8][9][10], pulsed laser deposition [11][12][13][14][15], electrostatic spray [16], and chemical vapour deposition [17], have been reported. PLD has been widely recognized as a very promising, versatile and efficient method for the deposition of metal oxide thin films [18].…”
Section: Introductionmentioning
confidence: 99%
“…The battery property depends upon three important factors such as nature of cathode, anode and the types of electrolyte used. Various kinds of lithium transition metal oxides have been used as cathode materials for rechargeable lithium batteries [1][2][3][4]. Among them, lithium manganese oxide (LiMn 2 O 4 ) based materials are of considerable interest as a cathode material because of its less toxicity, low cost, high operating voltage [5,6], etc.…”
Section: Introductionmentioning
confidence: 99%