2022
DOI: 10.1016/j.vacuum.2021.110675
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Studies on structural and dielectric properties of NbO2-Nb2Oet al.

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Cited by 11 publications
(5 citation statements)
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“…The morphologies and compositions of the samples treated at different temperatures are analyzed ex situ by SEM, XPS, and Raman spectroscopy. As shown in Figure2b−d, niobium ammonium oxalate thermally decomposes to the Nb 2 O 5 film on the sapphire substrate at 300 °C,41,42 which exhibits two peaks located at 207.9 and 210.6 eV in the Nb XPS spectrum and is consistent with the Nb 5+ species. After annealing at 400 °C, Nb 2 O 5 reacts with Se and forms nanorods, which results in two more peaks at 203.5 and 206.3 eV that correspond to Nb 4+ .…”
mentioning
confidence: 71%
“…The morphologies and compositions of the samples treated at different temperatures are analyzed ex situ by SEM, XPS, and Raman spectroscopy. As shown in Figure2b−d, niobium ammonium oxalate thermally decomposes to the Nb 2 O 5 film on the sapphire substrate at 300 °C,41,42 which exhibits two peaks located at 207.9 and 210.6 eV in the Nb XPS spectrum and is consistent with the Nb 5+ species. After annealing at 400 °C, Nb 2 O 5 reacts with Se and forms nanorods, which results in two more peaks at 203.5 and 206.3 eV that correspond to Nb 4+ .…”
mentioning
confidence: 71%
“…The 3d 3/2 and 3d 5/2 peaks are observed near at 210.3 and 207.5 eV for Nb 5+ cations in Nb 2 O 5 , and 208.4 and at 205.6 eV for Nb 4+ in NbO 2 , and 206.7 and 203.9 eV for Nb 2+ in NbO. 11,26,[33][34][35] Thus, the peaks with the energies for those phases were indexed accordingly with red, blue, and green lines, respectively. The Nb(O) TE deposited in pure Ar ambient consists of most of Nb and NbO with very little NbO 2 , and Nb 2 O 5 , where the peaks at 205.1 and 202.3 eV for 3d 3/2 and 3d 5/2 peaks of Nb are shown with purple line.…”
Section: Resultsmentioning
confidence: 99%
“…XPS spectra were analyzed using commercial software (CasaXPS, version 2.3.24, Casa Software Ltd., U.K.) and standard methods . Binding energy scales for NbC were calibrated by setting the C 1s binding energy for the carbidic feature at 282.7 eV. , For TaC, the corresponding C 1s carbide feature was set at 282.9 eV. , The spin–orbit doublet components of Nb 3d core level spectra (3d 5/2 and 3d 3/2 ) were separated by 2.75 eV. , Spectral deconvolution was carried out with a constraint of 3:2 on the 5/2:3/2 peak intensities, , with Nb 3d 7/2 binding energies as described in the literature , though allowed to vary slightly (<0.2 eV) for goodness of fit. A carbide phase C 1s binding energy of 282.9 eV was used to calibrate all the binding energies for TaC films. , The spin orbit doublet (4f 7/2 and 4f 5/2 ) of Ta 4f spectra was separated by 1.9 eV. Spectral deconvolution was set with a constraint of 4:3 on the 7/2:5/2 peak intensities .…”
Section: Methodsmentioning
confidence: 99%
“…24,25 The spin−orbit doublet components of Nb 3d core level spectra (3d 5/2 and 3d 3/2 ) were separated by 2.75 eV. 22,26 Spectral deconvolution was carried out with a constraint of 3:2 on the 5/ 2:3/2 peak intensities, 27,28 with Nb 3d 7/2 binding energies as described in the literature 26,29 though allowed to vary slightly (<0.2 eV) for goodness of fit. A carbide phase C 1s binding energy of 282.9 eV was used to calibrate all the binding energies for TaC films.…”
Section: Sample Deposition and Characterization Film Depositionmentioning
confidence: 99%