“…Baldacchini et al [12,13] compared CCs formation by extreme ultraviolet radiation, soft X-rays and by electrons in LiF crystals and thick film ($6 mm thickness) and they showed that the main spectroscopic features of the defects in polycrystalline films were same as those observed in crystals, but the formation efficiency of CCs was higher in film, where surface to volume ratio and the film compactness played a major role because of the presence of high density of grain boundaries. At the same time, in our previous reports [16,18], we observed that the grain size in nanometric films also played an important role in defect creation process and influenced the CCs concentration. The SHI irradiation of nano-granular LiF thin films leads to the formation of CCs as well as grain fragmentation simultaneously.…”