Structures and Physical Properties of Films Deposited by Simultaneous DC Sputtering of ZnO and In2O3 or ITO Targets

Moriga, Toshihiro; Okamoto, Takashi; Hiruta, K; Fujiwara, Azumi; Nakabayashi, Ichiro; Tominaga, Kikuo

doi:10.1006/jssc.2000.8919

Cited by 65 publications

(61 citation statements)

References 26 publications

(17 reference statements)

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“…The IZOCMB1 film presents a lower resistivity (2.3 × 10 −3 Ωcm) for 28.8-29.5 at.% In content (Figure 14a), and IZOCMB2 film has a lower resistivity (8.6 × 10 −4 Ωcm) in 44-49 at.% of In content region (Figure 14b). The literature reported similar data for the minimum resistivity obtained for samples with similar In atomic concentration deposited by magnetron sputtering [75,76].…”

Section: Nanoscaled Films and Layers 62supporting

confidence: 64%

Laser Prepared Thin Films for Optoelectronic Applications

Socol¹,

Socol²,

Preda³

et al. 2017

Nanoscaled Films and Layers

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Laser techniques such as pulsed laser deposition, combinatorial pulsed laser deposition, and matrix-assisted pulsed laser evaporation were used to deposit thin films for optoelectronic applications. High-quality transparent conductor oxide films ITO, AZO, and IZO were deposited on polyethylene terephthalate by PLD, an important experimental parameter being the target-substrate distance. The TCO films present a high transparency (>95%) and a reduced electrical resistivity (5 × 10 −4 Ωcm) characteristics very useful for their integration in the flexible electronics. In x Zn 1−x O films with a compositional library were obtained by CPLD. These films are featured by a high optical transmission (>95%), the lowest resistivity (8.6 × 10 −4 Ωcm) being observed for an indium content of about 44-49 at.%. Organic heterostructures based on arylenevinylene oligomers (P78 and P13) or arylene polymers (AMC16 and AMC22) were obtained by MAPLE. In the case of ITO/P78/Alq3/Al heterostructures, a higher current value is obtained when the film thickness increases. Also, a photovoltaic effect was observed for heterostructures based on AMC16 or AMC22 deposited on ITO covered by a thin layer of PEDOT:PSS. Due to their optical and electrical properties, such organic heterostructures can be interesting for the organic photovoltaic cells (OPV) applications.

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Section: Nanoscaled Films and Layers 62supporting

confidence: 64%

Laser Prepared Thin Films for Optoelectronic Applications

Socol¹,

Socol²,

Preda³

et al. 2017

Nanoscaled Films and Layers

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“…However, the exact composition at which IZO transforms from crystalline to amorphous depends in detail on the deposition conditions and hence may also vary from one deposition system to another. [22,23] To further elucidate the structural properties of the IZO thin films as a function of composition, both the 2u full width at half maximum (FWHM) and the lattice plane spacing for the IZO films as determined from the XRD spectra shown in Figure 1 are shown in Figure 2. From the FWHM data, the transition from crystalline to amorphous material is clearly observed (as shown in Figure 2a).…”

Section: Resultsmentioning

confidence: 99%

“…This maximum occurs in the amorphous region and a broad range of highly conducting material is found throughout the amorphous composition range of 55-84 cat% In, similar to that previously reported for as-deposited amorphous IZO. [12,22,23,26,27] Note that the conductivity data in Figure 3 do not overlap perfectly at the transitions from one IZO library to another. For example, this is particularly noticeable at $20 cat% indium where the transition from library L1 (!)…”

Section: Resultsmentioning

confidence: 99%

The Remarkable Thermal Stability of Amorphous In‐Zn‐O Transparent Conductors

Taylor

Readey

Hest

et al. 2008

Adv Funct Materials

163

122

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Transparent conducting oxides (TCOs) are increasingly critical components in photovoltaic cells, low‐e windows, flat panel displays, electrochromic devices, and flexible electronics. The conventional TCOs, such as Sn‐doped In2O3, are crystalline single phase materials. Here, we report on In‐Zn‐O (IZO), a compositionally tunable amorphous TCO with some significantly improved properties. Compositionally graded thin film samples were deposited by co‐sputtering from separate In2O3 and ZnO targets onto glass substrates at 100 °C. For the metals composition range of 55–84 cation% indium, the as‐deposited IZO thin films are amorphous, smooth (RRMS < 0.4 nm), conductive (σ ∼ 3000 Ω−1 · cm−1), and transparent in the visible (TVis > 90%). Furthermore, the amorphous IZO thin films demonstrate remarkable functional and structural stability with respect to heating up to 600 °C in either air or argon. Hence, though not completely understood at present, these amorphous materials constitute a new class of fundamentally interesting and technologically important high performance transparent conductors.

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“…This explains the anomaly of why the apparent optical gap of In 2 O 3 (ca. 3.6 eV) [7] reduces to below 3.2 eV on the addition of ZnO to form IZO [32,33,37].…”

Section: Natural Band Offsetsmentioning

confidence: 99%

“…The possibility of discovering alternative n-type TCO compositions with superior material properties has led to the investigation of ternary and quaternary systems, with In 2 O 3 (ZnO) n (IZO) being one particular focus of attention [32][33][34][35][36][37]. These studies have highlighted the improved chemical and thermal stability of IZO compared to ITO, making it more desirable for commercial application.…”

Section: Introductionmentioning

confidence: 99%

Multi-component transparent conducting oxides: progress in materials modelling

Walsh

Silva

Wei

2011

J. Phys.: Condens. Matter

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Transparent conducting oxides (TCOs) play an essential role in modern optoelectronic devices through their combination of electrical conductivity and optical transparency. We review recent progress in our understanding of multi-component TCOs formed from solid-solutions of ZnO, In2O3, Ga2O3 and Al2O3, with a particular emphasis on the contributions of materials modelling, primarily based on Density Functional Theory. In particular, we highlight three major results from our work: (i) the fundamental principles governing the crystal structures of multi-component oxide structures including (In2O3)(ZnO)n, named IZO, and (In2O3)m(Ga2O3) l (ZnO)n, named IGZO; (ii) the relationship between elemental composition and optical and electrical behaviour, including valence band alignments; (iii) the high-performance of amorphous oxide semiconductors. From these advances, the challenge of the rational design of novel electroceramic materials is discussed.PACS numbers: 71.15.Mb

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Structures and Physical Properties of Films Deposited by Simultaneous DC Sputtering of ZnO and In2O3 or ITO Targets

Cited by 65 publications

References 26 publications

Laser Prepared Thin Films for Optoelectronic Applications

Laser Prepared Thin Films for Optoelectronic Applications

The Remarkable Thermal Stability of Amorphous In‐Zn‐O Transparent Conductors

Multi-component transparent conducting oxides: progress in materials modelling

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