Structures and Characterizations of TiVCr and TiVCrZrY Films Deposited by Magnetron Sputtering under Different Bias Powers

Abstract

In this study, TiVCr and TiVCrZrY films were deposited on Si substrates by magnetron sputtering with the application of radio-frequency substrate bias of different powers from 0 to 15 W. The crystal structures, microstructure, and mechanical, electrical, and optical properties under the effect of bias were characterized. Both the TiVCr and TiVCrZrY films constructed simple solid solutions from all alloyed elements. The TiVCr films possessed a body-centered cubic crystal structure with a pyramid-like surface, while the TiVCrZrY films had a hexagonal close-packed crystal structure with a domelike surface. The microstructure and properties of the films varied with bias power. As the bias power increased, the microstructure of the films obviously changed from a porous to a dense columnar feature, and the density of the voids existing between the columns decreased. Accordingly, the physical properties of the films were improved. The hardness of the TiVCr and TiVCrZrY films was enhanced to about 11 and 14 GPa, and the electrical resistivity was lowered to 80 and 100 mu cm, respectively

Structure and mechanical properties of (TiVCr)N coatings prepared by energetic bombardment sputtering with different nitrogen flow ratios

“…In previous papers, TiVCr alloy coatings produced simple BCC solid solutions from all alloyed elements and achieved a hardness of 11 GPa [31]. This confirms that a coating of the present alloy design effectively increases hardness.…”

Cryogenic strength improvement by utilizing room-temperature deformation twinning in a partially recrystallized VCrMnFeCoNi high-entropy alloy

“…Although most HEAs have equi-atomic or near-equi-atomic compositions, the equi-atomic composition is not believed to be the optimum composition for a wide range of materials properties. The CrMnFeCoNi alloy system is not a unique system that yields fcc-single-phase microstructures containing more than five components 30 31 32 33 34 35 . The atomic sizes of all elements in the CrMnFeCoNi alloy are similar to each other, while the atomic size of vanadium is somewhat larger than the other elements.…”

Effect of Al Concentration on Microstructure and Properties of AlNbTiZr Medium-Entropy Alloy Coatings

“…To further verify and determine the phase structure of the coatings, TEM analyses were performed on all the as-spun coatings, as shown in Figure 4. , which implies a low crystallinity [36,37]. According to earlier studies, the broad halo diffraction peaks of these MEA coatings were usually caused by the formation of an amorphous or nanocrystalline phase [38,39].…”

“…Figure 3 exhibits the XRD patterns of the as-deposited AlNbTiZr MEA coatings with different Al contents. The as-deposited AlNbTiZr MEA coatings had distinct wide diffraction peaks between 36.1 • and 38.2•, which implies a low crystallinity[36,37]. According to earlier studies, the broad halo diffraction peaks of these MEA coatings were usually caused by the formation of an amorphous or nanocrystalline phase[38,39].…”