Structured Design Of Microelectromechanical Systems

Abstract

In order to efficiently design complex microelectromechanical systems (MEMS) having large numbers of multi-domain components, a hierarchically structured design approach that is compatible with standard IC design is needed. A graphical-based schematic, or structural, view is presented as a geometrically intuitive way to represent MEMS as a set of interconnected lumpedparameter elements. An initial library focuses on suspended-MEMS technology from which inertial sensors and other mechanical mechanisms can be designed. The schematic representation has a simulation interface enabling the designer to simulate the design at the component level. Synthesis of MEMS cells for common topologies provides the system designer with rapid, optimized component layout and associated macro-models. A synthesis module is developed for the popular folded-flexure micromechanical resonator topology. The algorithm minimizes a combination of total layout area and voltage applied to the electromechanical actuators. Synthesis results clearly show the design limits of behavioral parameters such as resonant frequency for a fixed process technology.

Foundations of Microelectromechanical System Synthesis

“…An approach will be developed which comes much closer to providing a schematic-like description for micromachined devices, but at the cost of narrowing the range of micromachined devices which can be so treated. So in that sense, this circuit-like description intended to make simulation easier is also a step towards top-down or structured design methodologies [46,47,48,49,50,51,52,53,54]. Developing a circuit representation for micromachined devices involves determining the list of elements for the circuit representation, the model for each element, and the definition of the nature or discipline for the terminals of the elements.…”

LMI relaxation to Riccati equations in structured control

“…It has already been shown in the above proof of Theorem 1 that those parameters satisfy (20). Now we show that the resulting controller (12) converges to the optimal controller. Indeed, let N o = I, M o = − 2 I satisfying (13); from (12) we have…”

“…Now we show that the resulting controller (12) converges to the optimal controller. Indeed, let N o = I, M o = − 2 I satisfying (13); from (12) we have…”

“…For example, the large-scale applications, such as power grids [22], communication networks [20], and arrays of micro-sensors/actuators [12] would fall into this category. Although centralized control could achieve the optimal performance by using standard control design techniques, it requires a high level of connectivity, computational complexity, communication costs and raises reliability concerns.…”

An Evolutionary Approach For Robust Layout Synthesis of MEMS

“…Layout synthesis is an important stage for structured design of MEMS [13], [14], after the stage of the systemlevel design [15]. The paper reports a method of robust layout synthesis of MEMS that transforms the robust design problem into a multi-objective constrained optimisation problem, and then solve it using NSGA-II, a special type of MOGA.…”