Structure of epitaxial δ-NbN films deposited by cathode reactive sputtering

Шалаева, Е. В.; Baryshev, R.S.; Kuznetsov, M. V.; Mitrofanov, B. V.

doi:10.1016/s0040-6090(94)06508-x

Cited by 7 publications

(2 citation statements)

References 16 publications

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“…In each case, even where single-crystal NbN was formed, the structure was locally highly defective (in agreement with the results of Shalaeva et al (1995)). Whilst no discrete threading dislocations were observed in these single-crystal NbN films, the dark-field contrast was indicative of local strains, and the common termination of fringes in high-resolution images such as figure 7 (inset) indicates small stacking faults and vacancy loops.…”

Section: Discussionsupporting

confidence: 88%

Growth of niobium nitride/aluminium nitride trilayers and multilayers

Lloyd

Tricker

Barber

et al. 2001

Philosophical Magazine A

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Section: Discussionsupporting

confidence: 88%

Growth of niobium nitride/aluminium nitride trilayers and multilayers

Lloyd

Tricker

Barber

et al. 2001

Philosophical Magazine A

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“…Studies of nitride coatings involve non-uniform and disordered structures. NbN is a binary nitride coating with enhanced superconductor characteristics that has been the subject of studies since the 1980s [1][2][3][4]. The lattice direction ratio for a NbN coating changes as the number of nitrogen vacancies changes for various preparation conditions.…”

Section: Introductionmentioning

confidence: 99%

Tribological Properties and Corrosion Resistance Properties of NbN/TiN Multilayer, TiNb-N<sub>X</sub> Single-Layer and Coatings that are Doped with Carbon

Kuo

Kao

et al. 2021

KEM

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NbN/TiN, TiNb-NX and CH-TiNb-N12 coatings are deposited by RF magnetron sputtering to determine the tribological properties and corrosion resistance. ‘x’ is the flux rate for nitrogen and ‘CH’ signifies the addition of acetylene. In terms of the corrosion resistance, all the coatings have a similar corrosion potential and NbN/TiN multilayer coatings exhibit the lowest corrosion current. The NbN/TiN multilayer has a low pitting potential so severe pitting corrosion is observed on the surface. CH-TiNb-N12 coating is most resistant to corrosion and exhibits no pitting before the test ends. In contact with counter-bodies with a Si3N4 ball or an AISI 52100 ball, a CH-TiNb-N12 coating acts as a solid lubricant so the wear mechanism shows the least abrasion. The CH-TiNb-N12 coating has the lowest wear rate and coefficient of friction for sliding against Si3N4 and AISI 52100 balls. The wear rate is respectively 3.2 and 6.8 times less than that for SKH51 substrate when sliding against Si3N4 and AISI 52100 balls. The results for this study show that a TiNb-N12-CH coating has the best tribological properties and corrosion resistance.

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Structure and Stability of Nonstoichiometric Cubic Phase δ-NbN1.2(O, C)

Шалаева

Mitrofanov

Швейкин

1996

Phys. Stat. Sol. (a)

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The nonstoichiometric &niobium nitride with surplus content of nitrogen atoms and the NaC1-type structure ( a = 0.439 nm), i.e. 6-NbN12(0, C), is stabilized in epitaxial deposited films. The diffraction patterns of these films display intensive diffuse scattering with regular intensity vanishings in the form of plane regions in the vicinity of structural and superstructural reciprocal space points of the &-phase and in the form of spherical surfaces in the neighbourhood of structural points. The analysis performed shows that this scattering can be associated with the presence of mixed-nature short-range order regions in the nonstoichiometric 6-NbN1.2 (0, C) phase which are characterized by longitudinal uncorrelated atomic displacement waves, as well a s by concentration-type waves. The ordered oxycarbonitride phase (X-phase) described in the first approximation by the cubic lattice with parameter a = 0.392 nm is found to precipitate when annealing the films at T = 873 K. It has been established that the diffuse scattering occurring in 6-NbN1.2(0, C) and the structure of shortrange order regions exhibit certain correlation with the structure of the precipitated ordered phase -Gloo, N 1.1Glo0, = K1; Golo, N 1.1Go10, = K z (where K1 and Kz are wave vectors of longitudinal atomic displacement waves characterizing short-range order).

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Structure of epitaxial δ-NbN films deposited by cathode reactive sputtering

Cited by 7 publications

References 16 publications

Growth of niobium nitride/aluminium nitride trilayers and multilayers

Growth of niobium nitride/aluminium nitride trilayers and multilayers

Tribological Properties and Corrosion Resistance Properties of NbN/TiN Multilayer, TiNb-N<sub>X</sub> Single-Layer and Coatings that are Doped with Carbon

Structure and Stability of Nonstoichiometric Cubic Phase δ-NbN1.2(O, C)

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