Structure, mechanical and tribological properties of HfCx films deposited by reactive magnetron sputtering

Wang, Shuo; Zhang, Kan; An, Tong; Hu, Chen; Ma, Yanyun; Wen, Mao; Zheng, Weitao

doi:10.1016/j.apsusc.2014.11.130

Cited by 32 publications

(13 citation statements)

References 47 publications

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“…The patterns for the TaC and HfC binary films show the peaks associated to the cubic Fm3-m TaC and HfC phases, JCPDS-ICDD 00-035-0801 and JCPDS-ICDD 03-065-7113, respectively. The occurrence of the cubic TaC and HfC phases in the binary films with a good crystallinity and without secondary phases contrast to previously reported studies where Ta 2 C and TaC 28 and metallic Hf and HfC 22 mixed phases were obtained. In the case of the ternary alloys, the 70TaC-30HfC sample retains the structure of the TaC, only showing a change in the intensity of the diffracted peaks.…”

Section: Resultscontrasting

confidence: 99%

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Robust tribo-mechanical and hot corrosion resistance of ultra-refractory Ta-Hf-C ternary alloy films

Yate

Coy

Aperador

2017

Sci Rep

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In this work we report the hot corrosion properties of binary and ternary films of the Ta-Hf-C system in V2O5-Na2SO4 (50%wt.-50%wt.) molten salts at 700 °C deposited on AISI D3 steel substrates. Additionally, the mechanical and nanowear properties of the films were studied. The results show that the ternary alloys consist of solid solutions of the TaC and HfC binary carbides. The ternary alloy films have higher hardness and elastic recoveries, reaching 26.2 GPa and 87%, respectively, and lower nanowear when compared to the binary films. The corrosion rates of the ternary alloys have a superior behavior compared to the binary films, with corrosion rates as low as 0.058 μm/year. The combination and tunability of high hardness, elastic recovery, low nanowear and an excellent resistance to high temperature corrosion demonstrates the potential of the ternary Ta-Hf-C alloy films for applications in extreme conditions.

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Section: Resultscontrasting

confidence: 99%

“…The fitting of the C 1s spectra in Fig. 3a showed the presence of Ta-C bonds in the TaC binary film at a binding energy around 283.0 eV 21 , Hf-C bonds in the HfC sample at around 282.2 eV 22 , and the presence of both Ta-C and Hf-C bonds in the ternary alloy films. A minor amount of C-C bonds at around 285.0 eV 23 was also detected.…”

Section: Resultsmentioning

confidence: 94%

Robust tribo-mechanical and hot corrosion resistance of ultra-refractory Ta-Hf-C ternary alloy films

Yate

Coy

Aperador

2017

Sci Rep

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“…Figure 2 shows the XPS Ta 4f and Hf 4f spectra of the TaC, HfC, and Ta-Hf-C mixture samples. The main Ta 4f 7/2 and Hf 4f 7/2 peak positions are located at approximately 23.3 and 14.8 eV and can be attributed to TaC [34] and HfC [33] carbide bonds, confirming the presence of carbides in their pure form. From the area of the photoelectron peaks, it was also possible to estimate the TaC and HfC phase contents in the mixture samples, and these values, which are listed in Table 1, demonstrate that the TaC and HfC contents are almost correlated to the RF power applied to the Ta and Hf targets.…”

Section: X-ray Photoelectron Spectroscopy (Xps)mentioning

confidence: 75%

“…The thicknesses of the Ta-Hf-C coatings were determined from the cross-sectional SEM images and are listed in Table 1. The TaC films are slightly thicker due to the higher sputtering yield of tantalum compared with that of hafnium [33].…”

Section: Cross-sectional Scanning Electron Microscopy (Sem)mentioning

confidence: 99%

Enhancement of the Pitting Corrosion Resistance of AISI 316LVM Steel with Ta-Hf-C/Au Bilayers for Biomedical Applications

Guzmán

Aperador

Yate

2017

Journal of Nanomaterials

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Tantalum carbide (TaC), hafnium carbide (HfC), and Ta-Hf-C mixed coatings with and without a gold (Au) interlayer were deposited on 316LVM steel substrates by the magnetron cosputtering technique in order to improve the corrosion resistance of steel substrates in a simulated biological fluid. To study the effect of the gold interlayer on pitting corrosion, the different systems were placed in contact with Ringer’s solution at pH 7.4 and a temperature of 37°C. The electrochemical properties of the coatings were determined using polarization curves. Subsequently, the surface morphologies were observed using scanning electron microscopy (SEM) in order to analyze the corrosion processes on the different surfaces. The gold interlayer was found to significantly improve the electrochemical properties of the system, showing a decrease in the pitting corrosion and deterioration rate, while it is expected that the binary and ternary carbides provide mechanical stability to the bilayers protecting the gold.

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“…HfC coatings can be synthesized in a reactive mode with C 2 H 2 or CH 4 [24,25]. The same effect was observed in TaC coatings; that is, the hardness decreases due to the appearance of an amorphous phase.…”

Section: Introductionmentioning

confidence: 76%

The Structure, Morphology, and Mechanical Properties of Ta-Hf-C Coatings Deposited by Pulsed Direct Current Reactive Magnetron Sputtering

et al. 2020

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Ta, Hf, TaCx, HfCx, and TaxHf1-xCy coatings were deposited by reactive pulsed Direct Current (DC) magnetron sputtering of Ta or Hf pure metallic targets in Ar plus CH4 gas mixtures. The properties have been investigated as a function of the carbon content, which is tuned via the CH4 flow rate. The discharge was characterized by means of Optical Emission Spectroscopy and, in our conditions, both Ta-C and Hf-C systems seem to be weakly reactive. The structure of the as-deposited pure tantalum film is metastable tetragonal β-Ta. The fcc-MeCx carbide phases (Me = Ta or Hf) are {111} textured at low carbon concentrations and then lose their preferred orientation for higher carbon concentrations. Transmission Electron Microscopy (TEM) analysis has highlighted the presence of an amorphous phase at higher carbon concentrations. When the carbon content increases, the coating’s morphology is first compact-columnar and becomes glassy because of the nano-sized grains and then returns to an open columnar morphology for the higher carbon concentrations. The hardness and Young’s modulus of TaCx coatings reach 36 and 405 GPa, respectively. For HfCx coatings, these values are 29 and 318 GPa. The MeCx coating residual stresses increase with the addition of carbon (from one-hundredth of 1 MPa to 1.5 GPa approximately). Nevertheless, the columnar morphology at a high carbon content allows the residual stresses to decrease. Concerning TaxHf1-xCy coatings, the structure and the microstructure analyses have revealed the creation of a nanostructured coating, with the formation of an fcc superlattice. The hardness is relatively constant independently of the chemical composition (22 GPa). The residual stress was strongly reduced compared to that of binary carbides coatings, due to the rotation of substrates.

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Structure, mechanical and tribological properties of HfCx films deposited by reactive magnetron sputtering

Cited by 32 publications

References 47 publications

Robust tribo-mechanical and hot corrosion resistance of ultra-refractory Ta-Hf-C ternary alloy films

Robust tribo-mechanical and hot corrosion resistance of ultra-refractory Ta-Hf-C ternary alloy films

Enhancement of the Pitting Corrosion Resistance of AISI 316LVM Steel with Ta-Hf-C/Au Bilayers for Biomedical Applications

The Structure, Morphology, and Mechanical Properties of Ta-Hf-C Coatings Deposited by Pulsed Direct Current Reactive Magnetron Sputtering

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