Structure design of nanometer positioning stage with a large stroke

Qi, 陈琦 Chen

doi:10.3788/ope.20162405.1065

Cited by 2 publications

(1 citation statement)

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“…In the two-dimensional micro-motion platform proposed by Yangmin Li et al of the University of Macau, 7 the displacement amplification mechanism is used to make the stroke reach 117 µm, and the positioning accuracy is higher than 2 nm. Chen Qi of Changchun Institute of Optics, Chinese Academy of Sciences, 8 developed a two-dimensional micro-motion platform using aerostatic guideway to drive the worktable. At the same time, the piezoelectric ceramic micro-displacement mechanism and friction drive were combined to make the micro-motion platform travel 220 mm in the X direction, 300 mm in the Y direction, and 5 nm in the Z direction.…”

Section: Introductionmentioning

confidence: 99%

Influence of machining parameters on micro-motion platform displacement during grinding Al-Mg alloys workpiece assisted by two-dimensional low-frequency vibration

Zhao

et al. 2021

Composites and Advanced Materials

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The main factors affecting the displacement of micro-motion platform during the grinding process are spindle speed, cutting force, and piezoelectric ceramic input voltage model. This article, using the orthogonal test method, found a set of machining parameters which lead to less displacement deviation between practical test and theoretic analysis. First of all, single-factor experiments were carried out to study how spindle speed, cutting force, and piezoelectric ceramic input voltage model affect the experimental results, and then the orthogonal test was conducted. The experimental datum shows that voltage model was the most influential factor, followed by spindle speed and cutting force. The optimum combination of grinding parameters was obtained as spindle speed of 800 r/min, cutting force of 18 N, and voltage model radius of 12 µm. At this time, the average unit error of displacement of micro-motion platform was 9.13%.

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Section: Introductionmentioning

confidence: 99%