Structure, deformation and fracture of arc evaporated Zr–Si–N hard films

Wear behavior of ZrAlN coated cutting tools during turning

“…Table II). The nanocomposite structure of the nc-Zr0.50Al0.50N coating also results in a lower hardness than that of the other coatings probably due to more pronounced grain boundary sliding [35] and perhaps even a less dense material [22]. The lowest wear rate is observed for the w- [36].…”

Effect of Silicon Content in Functional Properties of Thin Films

“…Reactive magnetron cosputtering [17, 24, 28, 32, 33, 35, 44, 46, 48, 49, 51-55, 57, 59, 63] ZrSiN Unfiltered cathodic arc evaporation [21,23] CrAlSiN Cathodic arc evaporation [66] TiSiN Chemical vapor deposition in a fluidized bed reactor at atmospheric pressure (AP/ FBR-CVD) [70] TiSiN A combination of DC and RF magnetron sputtering [41,64] TiSiN Vacuum cathodic arc evaporation [58] zAlSiN DC magnetron sputtering [19,47,71] WSiN DC reactive unbalanced magnetron sputtering [49,72] TiAlSiCuN DC reactive magnetron sputtering [65] ZrTiCrNbSiN Vacuum arc evaporation [31] CrZrSiN Unbalanced magnetron sputtering [37] TiSiN-Ag Reactive magnetron cosputtering [25] TaSiN and CrTaSiN Reactive magnetron cosputtering [36,50] AlTiSiN and CrSiN Cathode arc ion plating system [34,73] TiSiCN Conventional magnetron sputtering and plasma enhanced magnetron sputtering (PEMS) [38,74] ZrSiN Hybrid cathodic arc and chemical vapor process [56] TiAlVSiN Vacuum cathodic arc evaporation [58] NbSiN Unbalanced magnetron sputtering [71] CrSiN Closed field unbalanced magnetron sputtering [75] the MeN crystals or an increase of the thickness of SiN x amorphous phases [48,76]. This process is obtained with high temperature (>550°C) deposition and high nitrogen pressure [64].…”

“…Various works have shown that the Si exists as solid solution in the ZrN lattice up to 3.0 at.%, but when the Si content increases, the formation of the Si 3 N 4 phase is observed [17,21]. Therefore, the EDX and XPS results show that with a Si content of 8 at.%, the solubility limit of Si in ZrN lattice is exceeded, generating the formation of Si 3 N 4 into ZrN grain boundaries with the increased Si content, probability of the volume of the phase of Si 3 N 4 is increased, and the phase of ZrN is decreased.…”

“…Among all these compounds, we find that the transition metal nitrides (MeN) have been widely used in mechanical applications due to their high hardness and wear resistance [2,[13][14][15][16]. However, it has been found that the addition of a third element may improve the physical and chemical properties of MeN due to a change that this new element generates in the microstructure of these materials [1,[17][18][19][20][21][22][23][24][25][26][27][28][29][30]. These structures are called nanocomposite, and there are two different groups of hard nanocomposite films, for instance: (i) crystalline/amorphous nanocomposites and (ii) crystalline/crystalline nanocomposites.…”

Nanoindentation and scratch resistance of multilayered TiO2-SiO2coatings with different nanocolumnar structures deposited by PV-OAD

“…To assess the mechanical behavior of these multilayers and to assess their mechanical integrity, herein we have carried out a systematic nanoindentation study using different indenter tip geometries and contact loading conditions (i.e. indentation/scratch) [11,12,13,14,15,16] and applying the wellestablished Oliver and Pharr method of data analysis [17]. Special attention has been also paid to analyse the main damage and fracture events at micro-and nanometric length scales affecting both the whole layer assemblage and the coating/substrate interface as a function of the coating architecture.…”