Abstract:Abstract. This paper presents a study of the mechanical properties and an evaluation of damage mechanisms of nanocolumnar TiO 2 -SiO 2 multilayer coatings prepared by physical vapour oblique angle deposition at different configurations (slanted, zigzag or chiral) and two zenithal evaporation angles (70º or 85º). The characterization at micro-and nano-metric length scales of the mechanical properties of the multilayers has been carried out by nanoindentation and nanoscratch tests, while the morphological evalua… Show more
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