Structure, adhesion and corrosion behavior of CrN/TiN superlattice coatings deposited by the combined deep oscillation magnetron sputtering and pulsed dc magnetron sputtering

Microstructure and tribological behavior of TiAlSiN coatings deposited by deep oscillation magnetron sputtering

“…Toughness of the material is defined as its ability to absorb the energy during deformation up to its fracture, but as for hard coatings, the toughness is hard to determined because it is strongly influenced by the nature of substrate. The ratios of H and E, and critical loads in scratch tests was found to have close relationship with toughness and tribological properties …”

“…As shown in Figure , the adhesion of the coatings exhibited an initial increase from HF1 to above HF1, followed by a decrease to HF3 with an increase in V s from −30 to −120 V. It is noted that the coatings deposited at −60 V showed the excellent adhesion of above HF1 without any visible delamination and radial cracks at the edge of HRC indentation in SEM morphology (Figure B). Adhesion of coatings was found to be influenced by competitive factors of H/E* and H 3 /E* 2 ratios and residual stress state . It is reported that the highest H/E* and H 3 /E* 2 ratios contributed for the improvement in adhesion of the coatings with relatively low residual compressive stress.…”

“…Figure 6 illustrates the hardness, Young's modulus and H/ E* and H 3 /E* 2 ratios of TiAlSiN coatings deposited at various V s by DOMS. The H/E* and H 3 /E* 2 ratios were related to elastic strain to failure resistance and the plastic deformation resistance, which had a strong relationship with adhesion, toughness, and tribological properties, 22,30,33,43,44 respectively. As V s was increased from À30 to À60 V, the hardness (H), Young's modulus (E), H/E* and H 3 /E* 2 ratios gradually increased from 30.1 GPa, 345 GPa, 0.082 and 0.202 to 36.7 GPa, 362 GPa, 0.095 and 0.332, respectively.…”

“…TiAlSiN coatings with the same Si content of 7 and 15 at.% deposited by different techniques and conditions showed a great difference in properties . Besides, compared with the superhardness, toughness of hard coatings played a larger role in decreasing COF and wear rate by controlling crack initiation and propagation . Thus, it is expected to develop TiAlSiN nanocomposite coatings with similar Si content by decreasing grain size and controlling the distribution of phases to enhance tribological properties.…”

Multilayered vacuum-arc nanocomposite TiN/ZrN coatings before and after annealing: Structure, properties, first-principles calculations

“…A varying the deposition conditions, such as gas pressure in the deposition chamber, bias potential, bilayer thickness, etc. allows to fabricate coatings with very high hardness [9][10][11], good wear coefficient and resistance to wear, oxidation [12][13][14][15][16][17] and to corrosion [18,19] as well as with good electrical properties [20,21]. As it was reported in the previous papers [22,23], coatings on the (Ti,Zr)N base have high hardness 42-48 GPa, as well as resistance to oxidation under the influence of high temperatures 1170°С [24][25][26][27][28].…”