Structural properties of the titanium dioxide thin films grown by atomic layer deposition at various numbers of reaction cycles

Alekhin, A. P.; Gudkova, S.A.; Markeev, Andrey M.; Mitiaev, A.S.; Sigarev, A. A.; Toknova, V. F.

doi:10.1016/j.apsusc.2010.06.061

Cited by 33 publications

(24 citation statements)

References 19 publications

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“…4,19,[29][30][31] In our previous study, 32 although it cannot be observed directly in XRD, the asprepared (without calcination) TiO 2 with fewer ALD cycles has a lower degree of local order, on the contrary more ALD cycles leading to an improvement of the degree of local order. This phenomenon has also been noticed in previous studies carried out by Alekhin et al 33 and Moret et al 34 In the transformation from amorphous tocrystalline by calcination, the TiO 2 with lower degree of local order leds to be transformed into crystallized TiO 2 with lower degree of crystallinity and conversely, the TiO 2 amorphous with higher degree of local order is able to be transformed into TiO 2 crystalline with higher degree of crystallinity as indicated by the intensity of (101) peak in XRD (Fig. 4(a)).…”

Section: Resultssupporting

confidence: 73%

Atomic layer deposition of TiO2-nanomembrane-based photocatalysts with enhanced performance

et al. 2016

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In this study, TiO2 and TiO2-ZnO nanomembranes were fabricated by atomic layer deposition using the three-dimensionally porous template and their photocatalytic properties were investigated. The nanomembranes were firstly deposited onto the surface of polyurethane porous sponge templates (sacrificial templates), followed by a calcination at 500 or 800 °C. Three-dimensionally porous structures as a replica of the porous sponge templates were thus achieved. By a pulverizing process, the porous structures were broken into small pieces, which were then employed as photocatalyst. Experimental results show that the degree of crystallinity is raised by increasing of the nanomembrane thickness due to the increase of the grain size with minimizing the number of grain boundaries in the thicker nanomembrane, which is beneficial to enhance the photocatalysis efficiency. On the other hand, the photocatalytic activity can also be improved by TiO2-ZnO composite, due to lower electron-hole recombination possibility and better carrier conductivity.

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Section: Resultssupporting

confidence: 73%

Atomic layer deposition of TiO2-nanomembrane-based photocatalysts with enhanced performance

et al. 2016

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“…The data illustrated in color in one of the figures, is shown in black in all the other figures. The data was retrieved from the following references: Ti(O i Pr)4/H2O [37,359,364,366,368,379,381,382,384,385,387,[391][392][393]396,398,400,402,404], Ti(O i Pr)4/H2O2 [540], Ti(O i Pr)4/O3 [547,551], Ti(O i Pr)4/O2 plasma [384,397,567,[569][570][571]573,574,578], Ti(O i Pr)4/H2O plasma [384,397], Ti(O i Pr)4/N2O plasma [576], Ti(O i Pr)4/HCOOH [598], Ti(O i Pr)4/CH3OOH [598], Ti(OEt)4/H2O [37,63,607,615], Ti(OEt)4/H2O2 [54,63,91], Ti(OMe)4/H2O2 [614,618,622,627], Ti(OMe)4/O3 …”

Section: Alkoxidesmentioning

confidence: 99%

Titanium dioxide thin films by atomic layer deposition: a review

Niemelä

Marín

Karppinen

2017

Semicond. Sci. Technol.

137

116

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Within its rich phase diagram titanium dioxide is a truly multifunctional material with a property palette that has been shown to span from dielectric to transparent-conducting characteristics, in addition to the well-known catalytic properties. At the same time down-scaling of microelectronic devices has led to an explosive growth in research on atomic layer deposition (ALD) of a wide variety of frontier thin-film materials, among which TiO2 is one of the most popular ones. In this topical review we summarize the advances in research of ALD of titanium dioxide starting from the chemistries of the over 50 different deposition routes developed for TiO2 and the resultant structural characteristics of the films. We then continue with the doped ALD-TiO2 thin films from the perspective of dielectric, transparent-conductor and photocatalytic applications. Moreover, in order to cov er the lat est tr ends in t he research f ield, both the var iously constr ucted TiO2 nanostructures enabled by ALD and the Ti-based hybrid inorganic-organic films grown by the emerging ALD/MLD (combined atomic/molecular layer deposition) technique are discussed.

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“…Thinning of the specimen anatase TiO 2 films can be used in photocatalysis as well as in electrophotocatalysis. They are produced by various methods: sol-gel [13], anodization [14], reactive magnetron sputtering [15], atomic layer deposition (ALD) [16] or metalorganic chemical vapor deposition (MOCVD) [4,17,18]. This last process interestingly enables the production of various hierarchical morphologies that have an impact on the photocatalytic properties [5,19].…”

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“…A significant number of results has been reported on the determination of the morphology [16,18,28,29], the crystallographic phases [22], the mechanical residual stress [26,30], the purity [2], the electrical transport [9], and the optical band-gap [31]. However, there is no systematic, holistic study of TiO 2 films in the context of a strong morphology evolution that connects all of these characteristics to the evolution of their photocatalytic properties.…”

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confidence: 99%

TiO2 nanotree films for the production of green H2 by solar water splitting: From microstructural and optical characteristics to the photocatalytic properties

Miquelot

Debieu

Rouessac

et al. 2019

Applied Surface Science

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Green H 2 production by solar water splitting relies entirely on the intrinsic properties of the photocatalyst. In this study the impact of these intrinsic properties on the photocatalytic activity of anatase TiO 2 , the quintessential component of state of the art photocatalytic systems was explored at the nanoscale. The exploration involved a holistic microstructural and optical characterization of fully crystallized anatase thin films synthetized by metalorganic chemical vapor deposition. A combination of electron microscopy, spectroscopic ellipsometry, and infrared spectroscopy revealed that when the deposition temperature increased, the morphology evolved from dense to porous and columnar nanostructures. Interestingly, the columns with a complex, tree-like nanostructure photogenerated 18 times more H 2 than the densest sample. This result shows that the beneficial effect of the morphological nano-complexification and crystallographic diversification of the exchange facets on the photocatalytic performance outweighs the detrimental aspects inherent to this evolution, namely the drop of the charge carrier transport and the increase of residual stress. 1. Introduction Research on renewable energy is vital in the current context of global warming and societies that rely on high energy consumption. Hydrogen is a promising source of renewable energy and catalyzed solar water splitting (SWS) is a carbon-free method to produce it. Numerous materials have been tested to catalyze this reaction [1,2]. Among them, TiO 2-because it is non-toxic, chemically stable, abundant and affordable has been widely investigated as a photocatalytic material since Fujishima and Honda's seminal work [3-8]. Despite its high energy band-gap (3.2 eV), crystalline anatase TiO 2 shows attractive opto-electronic properties. It is an indirect semiconductor with a long exciton lifetime [9,10]; it has a conduction band minimum energy level below the redox potential of H+/H 2 (0 V vs. NHE) and a valence band maximum energy level above the redox potential of O 2 /H 2 O (+1.23 V vs. NHE) [11,12].

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Structural properties of the titanium dioxide thin films grown by atomic layer deposition at various numbers of reaction cycles

Cited by 33 publications

References 19 publications

Atomic layer deposition of TiO2-nanomembrane-based photocatalysts with enhanced performance

Atomic layer deposition of TiO2-nanomembrane-based photocatalysts with enhanced performance

Titanium dioxide thin films by atomic layer deposition: a review

TiO2 nanotree films for the production of green H2 by solar water splitting: From microstructural and optical characteristics to the photocatalytic properties

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