Structural parameter analysis and experimental study of micropumps with saw-tooth microchannel

Guan, Yanfang; Liu, Chunbo

doi:10.1016/j.sna.2015.09.003

Cited by 7 publications

(7 citation statements)

References 14 publications

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“…The geometry characteristics of the pump chambers (the diameters of P1 and P2 are 10 mm), diffuser/nozzle microchannel (the length is 1.906 mm) and the inlet/outlet chambers (the diameter is 4 mm) are kept identical for all micropumps. 22 The depth is 0.3 mm for the microchannels and inlet/outlet holes, whereas the depth is 1.7 mm for the pump chambers (P1 and P2) as shown in Fig. 2(d) and (e).…”

Section: Design and Fabricationmentioning

confidence: 91%

“…The performance of the micropump is based on a unique trait of the "diffuser-nozzle" microchannels, which has been shown to have lower flow resistance for diffuser direction flow than nozzle direction flow. 22 Consequently, a reciprocating piezoelectric transducer motion results in a net flow from the left to right for the three kinds of micropumps.…”

Section: Theory Analysismentioning

confidence: 99%

“…[12][13][14] From the 1990s, A. Olsson put forward the first micropump with a diffuser/nozzle microchannel, 15 followed by numerous micropumps being developed and improved for several decades, including a drug delivery micropump, an EHD driving micropump, a thermo-pneumatic micropump and an electroosmotic pump, etc. [16][17][18][19][20] Although the micropumps with a single pump chamber have been widely studied recently, [21][22][23] micropumps with series and parallel connections of pump chambers have been proposed due to their favorable pumping performance. 24,25 For example, Li Guo 26 and Azarbadegan 27 fabricated a micropump with parallel connected pump chambers when the measured flow rate is 151.7 µl/min.…”

Section: Introductionmentioning

confidence: 99%

See 2 more Smart Citations

Experimental Investigation of Piezoelectric Micropumps with Single, Series or Parallel Pump Chambers

Guan¹,

Bai²,

Meng³

et al. 2020

The International Journal of Acoustics and Vibration

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Three types of piezoelectric micropumps following different configurations: single, series, and parallel connection, are developed and investigated. All the micropumps are fabricated by wet etching technology and sealed by high temperature glass bonding. They share the same dimension characteristic of diffuser/nozzle microchannels. Verifying the impact of adding series or parallel connected pump chambers on single chambers, as well as verifying the performance of the flow rate, pressure and piezoelectric transducer vibration of three micropumps have been examined. Through the comparisons between three kinds of micropumps, the results show that the flow rate of the micropumps with parallel connected pump chambers have a higher flow rate than that of micropumps with single and serial connected pump chambers under the same driving conditions. In addition, both the flow rate and pressure with the serial micropump are the lowest. The pressure of the micropump with single pump chamber is larger than other kinds of micropumps at certain driving frequencies. Consequently, increasing the pump chambers cannot always increase the performance of the micropump. This coincides with the theory analysis. Finally, the vibration performance of piezoelectric transducers with three micropumps have been carried out. The parallel transducer has a higher vibration displacement than the other two kinds of micropumps. These results have great potentials for integration into labs with a chip or microfluidic driven systems.

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Section: Design and Fabricationmentioning

confidence: 91%

Section: Theory Analysismentioning

confidence: 99%

Section: Introductionmentioning

confidence: 99%

See 1 more Smart Citation

Experimental Investigation of Piezoelectric Micropumps with Single, Series or Parallel Pump Chambers

Guan¹,

Bai²,

Meng³

et al. 2020

The International Journal of Acoustics and Vibration

View full text Add to dashboard Cite

show abstract

“…The effectiveness of the flow rectification of the micropump can be produced based on the net flow of the fluid from the inlet to the outlet if a reasonable design is adopted. [34][35][36][37] The force F1 of the PZT from the transformation of electromechanical energy by the piezoelectric transducer is transmitted to the fluid in the pump chamber. At the same time, the force F2 from the fluid has a counter effect in the opposite direction.…”

Section: Structural Design and Fabrication Of The Micropumpmentioning

confidence: 99%

“…3(b). A minimum section width of 0.04 mm and a length of 1.093 mm were obtained according to the advanced silicon deep reactive ion etching (DRIE) technique on 450 µm-thick silicon wafers 34,[38][39][40] in Fig. 4.…”

Section: Structural Design and Fabrication Of The Micropumpmentioning

confidence: 99%

Modeling, Vibration Analysis and Fabrication of Micropumps Based on Piezoelectric Transducers

Guan¹,

Meng²,

Liu³

et al. 2020

The International Journal of Acoustics and Vibration

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The parametric and vibrational characteristics of PZTs (Piezoelectric Transducers) with different diameters before and after coupling are discussed by finite element analysis. It is shown that the vibration stability of the piezoelectric transducer decreases with increasing driving frequency. The PZT's variation of maximum displacement with frequency shows the same trend for different driving conditions according to vibration measurement under conditions of both free and forced vibration (before and after sealing with the pump body). The maximum displacement under forced vibration is less than that under free vibration. The maximum displacement is inversely proportional to the diameter of the transducer and directly proportional to the driving voltage under both free and forced vibration. Micropumps with diffuser/nozzle microvalves are designed and fabricated with different external diameters of the PZTs. Finally, the flow rate and pressure of the micropumps are measured, which are consistent with the vibrational results. Moreover, the maximum displacement is larger under a square-wave driving signal, followed by a sine-wave signal, and then a triangle-wave signal. For a PZT with an external diameter of $12$ mm, the maximum flow rate and pressure value are $150$~$upmu$l/min and $346$ Pa, respectively, under sine-wave driving at $100$ Vpp driving voltage.

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Detection and extraction of heavy metal ions using paper-based analytical devices fabricated via atom stamp printing

Guan

Sun

2020

Microsyst Nanoeng

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As a promising concept, microfluidic paper-based analytical devices (μPADs) have seen rapid development in recent years. In this study, a new method of fabricating μPADs by atom stamp printing (ASP) is proposed and studied. The advantages of this new method compared to other methods include its low cost, ease of operation, high production efficiency, and high resolution (the minimum widths of the hydrophilic channels and hydrophobic barriers are 328 and 312 μm, respectively). As a proof of concept, μPADs fabricated with the ASP method were used to detect different concentrations of Cu 2+ via a colorimetric method. Moreover, combined with a distance-based detection method, these devices achieved a Cu 2+ detection limit of down to 1 mg/L. In addition, a new paper-based solid-liquid extraction device (PSED) based on a three-dimensional (3D) μPAD with a "3 + 2" structure and a recyclable extraction mode was developed. Specifically, using the characteristics of paper filtration and capillary force, the device completed multiple extraction and filtration steps from traditional solid-liquid extraction processes with high efficiency. The developed PSED platform allows the detection of heavy metal ions much more cheaply and simply and with a faster response time at the point of care, and it has great promise for applications in food safety and environmental pollution in resource-limited areas.

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Structural parameter analysis and experimental study of micropumps with saw-tooth microchannel

Cited by 7 publications

References 14 publications

Experimental Investigation of Piezoelectric Micropumps with Single, Series or Parallel Pump Chambers

Experimental Investigation of Piezoelectric Micropumps with Single, Series or Parallel Pump Chambers

Modeling, Vibration Analysis and Fabrication of Micropumps Based on Piezoelectric Transducers

Detection and extraction of heavy metal ions using paper-based analytical devices fabricated via atom stamp printing

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