Structural optimization and analysis of surface acoustic wave biosensor based on numerical method

Zhou, Zhaoming; Tan, Jinsong; Zhang, Jia; Qin, Mian

doi:10.1177/1550147719875648

Cited by 6 publications

(5 citation statements)

References 28 publications

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“…The performance of the accelerometer integrated with proposed cantilever beam was investigated using the simulation model in section (2). The beam and the proof mass are metal(Q235) and the material parameters [27,28] are listed in SI. The simulation parameters of the SAW resonator are listed in table 1 but with 7 × 5 × 0.5mm ST-quartz as the substrate, and the SAW device also works in Rayleigh wave mode.…”

Section: Simulation Results and Discussionmentioning

confidence: 99%

Equal-strength beam design of acoustic wave accelerometers

Zhao,

Zhou,

Kuang

et al. 2023

Phys. Scr.

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Surface acoustic wave (SAW) based accelerometers have received significant attention due to their digital output, low cost, mass production and easy implementation of wireless passive function. However, conventionally triangular cantilever-beam based SAW accelerometers often have non-uniform strains generated along the beams, which cause emergence of parasitic wave modes and measurement errors. In this paper, a simulation platform was developed to analyze and optimize designs of SAW accelerometers and variable-thickness and equal-strength beams were designed to solve the critical issue of non-uniform strain distribution along the beam. Frequency responses of SAW accelerometers under the acceleration were successfully obtained using the simulation platform, with the visualized strain/stress distribution and particle displacement field. The accuracy of this simulation platform was verified using the experimental result reported in literature. A highly sensitive and equal-strength beam SAW accelerometer was achieved with a sensitivity up to 1.40 kHz/g, a linearity coefficient of ~1, and a measurement range of 0~15 g. Furthermore, a high-G accelerometer was designed, with the capability of enduring large shocks up to 11,500 g and a sensitivity of 6.96 Hz/g.

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Section: Simulation Results and Discussionmentioning

confidence: 99%

Equal-strength beam design of acoustic wave accelerometers

Zhao,

Zhou,

Kuang

et al. 2023

Phys. Scr.

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“…Compared to the conventional quartz piezoelectric substrate material, the author chose Y Z-LiNbO 3 with a larger wave speed as the piezoelectric substrate material for SAW sensors [ 10 , 11 ], whose wave speed

is 3488 m/s and wavelength is denoted by λ . The expected center frequency of the SAW device is 146 MHz.…”

Section: Modeling Of Saw Sensorsmentioning

confidence: 99%

Simulation Study of FEUDT Structure Optimization and Sensitive Film Loading of SAW Devices

et al. 2022

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In order to further improve the degree of frequency response of the surface acoustic wave (SAW) sensor for gas detection, the structure of the forked-finger transducer was analyzed, and its optimal structural parameters were simulated and designed. The simulation model of the unidirectional fork-finger transducer is established by using COMSOL finite element software. The thickness of the piezoelectric substrate, the electrode structure and material, and the thickness of the coating film are optimized and simulated. The results show that: the optimal thickness of the piezoelectric substrate is 3λ. The optimal thickness ratio and the lay-up ratio of the forked-finger electrode are 0.02 and 0.5, respectively. The Al electrode is more suitable as the a forked-finger electrode material compared to Cu, Au and Pt materials. Under the same conditions, the metal oxide-sensitive film (ZnO and TiO2) has a higher frequency response than the polymer-sensitive film (polyisobutylene and polystyrene), and the best sensitive film thickness range is 0.5~1 μm.

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“…Surface acoustic wave derives its name as a result of the energy being concentrated on the surface of the piezoelectric substrate, within one to two acoustic wavelength thicknesses, with the acoustic amplitude decaying along the thickness direction [43,203]. Wave propagation through the surface of the elastic solids was first proposed by Lord Rayleigh, in 1885 [204].…”

Section: Surface Acoustic Wave Biosensorsmentioning

confidence: 99%

“…For the applied RF frequency, f, the generated mechanical waves constructively interfere if the pitch of the IDT represented by p, in Figure 23, is equal to the acoustic wavelength. The corresponding frequency of the propagating surface wave is the resonant frequency of the device, given by [203,209]…”

Section: Surface Acoustic Wave Biosensorsmentioning

confidence: 99%

“…A vector voltmeter can also be used for measuring the amplitude and phase difference of the delay line signals. More precisely, highly sensitive measurements can be made by measuring the resonant frequency shift by operating the SAW device in the feedback loop of an RF amplifier forming an oscillator circuit [203].…”

Section: Saw As Biosensors: Operating Principlementioning

confidence: 99%

See 1 more Smart Citation

Acoustic Biosensors and Microfluidic Devices in the Decennium: Principles and Applications

Nair

Teo

2021

Micromachines

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Lab-on-a-chip (LOC) technology has gained primary attention in the past decade, where label-free biosensors and microfluidic actuation platforms are integrated to realize such LOC devices. Among the multitude of technologies that enables the successful integration of these two features, the piezoelectric acoustic wave method is best suited for handling biological samples due to biocompatibility, label-free and non-invasive properties. In this review paper, we present a study on the use of acoustic waves generated by piezoelectric materials in the area of label-free biosensors and microfluidic actuation towards the realization of LOC and POC devices. The categorization of acoustic wave technology into the bulk acoustic wave and surface acoustic wave has been considered with the inclusion of biological sample sensing and manipulation applications. This paper presents an approach with a comprehensive study on the fundamental operating principles of acoustic waves in biosensing and microfluidic actuation, acoustic wave modes suitable for sensing and actuation, piezoelectric materials used for acoustic wave generation, fabrication methods, and challenges in the use of acoustic wave modes in biosensing. Recent developments in the past decade, in various sensing potentialities of acoustic waves in a myriad of applications, including sensing of proteins, disease biomarkers, DNA, pathogenic microorganisms, acoustofluidic manipulation, and the sorting of biological samples such as cells, have been given primary focus. An insight into the future perspectives of real-time, label-free, and portable LOC devices utilizing acoustic waves is also presented. The developments in the field of thin-film piezoelectric materials, with the possibility of integrating sensing and actuation on a single platform utilizing the reversible property of smart piezoelectric materials, provide a step forward in the realization of monolithic integrated LOC and POC devices. Finally, the present paper highlights the key benefits and challenges in terms of commercialization, in the field of acoustic wave-based biosensors and actuation platforms.

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Structural optimization and analysis of surface acoustic wave biosensor based on numerical method

Cited by 6 publications

References 28 publications

Equal-strength beam design of acoustic wave accelerometers

Equal-strength beam design of acoustic wave accelerometers

Simulation Study of FEUDT Structure Optimization and Sensitive Film Loading of SAW Devices

Acoustic Biosensors and Microfluidic Devices in the Decennium: Principles and Applications

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