2017
DOI: 10.1088/2053-1591/aa7f59
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Structural, optical and XPS study of thermal evaporated In2O3thin films

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Cited by 58 publications
(26 citation statements)
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“…Therefore, in InSe nanosheets part of Se atoms participate to the formation of the SeO 2 phase. Correspondingly, the In‐3d core levels of InSe nanosheets (Figure 4c) exhibited components due to In 2 Se 3 (33%) at BE = 445.3 eV, InSe x O/In 2 O 3 (36%) at BE = 445.46 eV and In 2 O 3− x (OH) y (19.7%) at BE = 446 eV for J = 5/2 components, [ 47 ] respectively. We estimate the thickness of In 2 O 3 skin to be (1.3 ± 0.1) nm, which corresponds to ≈1.5 QL, considering c = 0.89 nm for O–In–O–In–O stacking.…”
Section: Resultsmentioning
confidence: 99%
“…Therefore, in InSe nanosheets part of Se atoms participate to the formation of the SeO 2 phase. Correspondingly, the In‐3d core levels of InSe nanosheets (Figure 4c) exhibited components due to In 2 Se 3 (33%) at BE = 445.3 eV, InSe x O/In 2 O 3 (36%) at BE = 445.46 eV and In 2 O 3− x (OH) y (19.7%) at BE = 446 eV for J = 5/2 components, [ 47 ] respectively. We estimate the thickness of In 2 O 3 skin to be (1.3 ± 0.1) nm, which corresponds to ≈1.5 QL, considering c = 0.89 nm for O–In–O–In–O stacking.…”
Section: Resultsmentioning
confidence: 99%
“…Compared to the binding energy of In 2 O 3 film deposited at 150 °C, at high growth temperatures of 200 and 250 °C, the In3 d 5/2 core peak shifted slightly to the lower binding energy of 0.3 eV. In metal bonding, the binding energy peak appeared at 443.6 eV [ 37 , 38 ]; thus, the lower binding energy is attributed to the oxygen vacancy in the In 2 O 3 films. The distance between the In3 d (In3 d 5/2 and In3 d 3/2 ) spin-orbit peak to peak is 7.5 eV (taken from Figure 5 b) confirms the materialization of In 2 O 3 [ 37 ].…”
Section: Resultsmentioning
confidence: 99%
“…A strong peak with a binding energy of 529.7 eV was observed at 115 and 150 °C, whereas, at high growth temperatures of 200 and 250 ℃, the O1 s peak shifted towards slightly lower binding energy (0.1 eV), the same trend as In binding states observed. This high-intensity strong peak dovetails to the O bonds in the O–In lattice in the films [ 25 , 29 , 30 , 38 ]. Furthermore, this peak intensity increased along with growth temperature owing to the strong bonding and improved crystallinity of the grown films.…”
Section: Resultsmentioning
confidence: 99%
“…Электрические свойства пленок оксида индия сильно зависят от метода синтеза и структуры. Разработано довольно много методов синтеза пленок оксида индия: золь-гель метод [9,10], электронное и термическое испарение [4,11,12], метод магнетронного напыления [13], осаждение из газовой фазы [14], осаждение с помощью лазерной абляции [15]. Среди многочисленных методов метод термического испарения имеет ряд преимуществ -он сравнительно дешевый, простой, обеспечивает получение пленок в том числе и в промышленных масштабах.…”
Section: Introductionunclassified
“…Среди многочисленных методов метод термического испарения имеет ряд преимуществ -он сравнительно дешевый, простой, обеспечивает получение пленок в том числе и в промышленных масштабах. Кроме того, этот метод позволяет варьировать структуру, а вместе с тем и электрические параметры пленок (проводимость, концентрацию носителей заряда и их подвижность) в широком диапазоне [4,12,16].…”
Section: Introductionunclassified