Structural, Optical, and Thermoelectric Properties of the ZnO:Al Films Synthesized by Atomic Layer Deposition

Тамбасов, И. А.; Волочаев, М. Н.; Voronin, A. I.; Evsevskaya, N. P.; Masyugin, A. N.; Aleksandrovskii, A. S.; Smolyarova, T. E.; Немцев, И. В.; Lyashchenko, S. A.; Бондаренко, Г. Н.; Tambasova, Ekaterina V.

doi:10.1134/s1063783419100354

Cited by 7 publications

(2 citation statements)

References 30 publications

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“…A target Al/Zn cycle ratio of 4% was chosen similarly to previous work, [41] which is below the solubility limit of Al in the ZnO matrix. [74,75] The supercycle of the ALD process, as shown in Figure 1, begins with the introduction of DEZ vapor with a pulse length of t 1 = 0.125 s. For the DEZ cycle, the chamber pressure was set at 150 mTorr. This was then subsequently followed by a purge step (t p = 5 s) and then the introduction of H 2 O vapor with a dose time of 0.150 s (t 3 = 0.150 s).…”

Section: Methodsmentioning

confidence: 99%

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Ultralow Thermal Conductivity and Improved Thermoelectric Properties of Al‐Doped ZnO by In Situ O₂ Plasma Treatment

et al. 2023

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The thriving of Internet‐of‐Things and integrated wireless sensor networks has brought an unprecedented demand for sustainable micro‐Watt‐scale power supplies. Development of high‐performing micro‐thermoelectric generator (μ‐TEG) that can convert waste thermal energy into electricity and provide sustainable micro‐Watt‐scale power is therefore extremely timely and important. Herein, a significant advance in the development of earth‐abundant, nontoxic thermoelectric materials of aluminum‐doped zinc oxide (AZO) is presented. Through nanostructure engineering using a novel in situ O2 plasma treatment, AZO films are demonstrated with ultralow thermal conductivity of 0.16 W m−1 K−1 which is the lowest reported in the literature. This nanostructured film yields a power factor of 294 μW m−1 K−2 at 563 K and has resulted in a state‐of‐the‐art ZT of 0.11 at room temperature and 0.72 at 563 K for AZO thin films. Furthermore, the fabrication and testing of a prototype lateral μ‐TEG are reported based on the AZO thin film which achieves a power output of 1.08 nW with an applied temperature difference of 16.9 °C.

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Section: Methodsmentioning

confidence: 99%

“…A target Al/Zn cycle ratio of 4% was chosen similarly to previous work, [ 41 ] which is below the solubility limit of Al in the ZnO matrix. [ 74,75 ]…”

Section: Methodsmentioning

confidence: 99%

Ultralow Thermal Conductivity and Improved Thermoelectric Properties of Al‐Doped ZnO by In Situ O₂ Plasma Treatment

et al. 2023

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Structural, Optical, and Electrical Characterization of Sol–Gel Processed Screen-Printed CdO:Li Film

Kumar¹,

Kumari²,

Sharma³

et al. 2023

J Appl Spectrosc

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Flexible thermoelectric module based on zinc oxide thin film grown via SILAR

Klochko

Klepikova

Khrypunova

et al. 2021

Current Applied Physics

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Structural, Optical, and Thermoelectric Properties of the ZnO:Al Films Synthesized by Atomic Layer Deposition

Cited by 7 publications

References 30 publications

Ultralow Thermal Conductivity and Improved Thermoelectric Properties of Al‐Doped ZnO by In Situ O₂ Plasma Treatment

Ultralow Thermal Conductivity and Improved Thermoelectric Properties of Al‐Doped ZnO by In Situ O₂ Plasma Treatment

Structural, Optical, and Electrical Characterization of Sol–Gel Processed Screen-Printed CdO:Li Film

Flexible thermoelectric module based on zinc oxide thin film grown via SILAR

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Structural, Optical, and Thermoelectric Properties of the ZnO:Al Films Synthesized by Atomic Layer Deposition

Cited by 7 publications

References 30 publications

Ultralow Thermal Conductivity and Improved Thermoelectric Properties of Al‐Doped ZnO by In Situ O2 Plasma Treatment

Ultralow Thermal Conductivity and Improved Thermoelectric Properties of Al‐Doped ZnO by In Situ O2 Plasma Treatment

Structural, Optical, and Electrical Characterization of Sol–Gel Processed Screen-Printed CdO:Li Film

Flexible thermoelectric module based on zinc oxide thin film grown via SILAR

Contact Info

Product

Resources

About

Ultralow Thermal Conductivity and Improved Thermoelectric Properties of Al‐Doped ZnO by In Situ O₂ Plasma Treatment

Ultralow Thermal Conductivity and Improved Thermoelectric Properties of Al‐Doped ZnO by In Situ O₂ Plasma Treatment