2010
DOI: 10.1016/j.surfcoat.2010.03.031
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Structural, mechanical, tribological, and corrosion properties of a-SiC:H coatings prepared by PECVD

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Cited by 43 publications
(45 citation statements)
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“…H 3 /E 2 increases from 1.6 to 7.9 MPa as oxygen is incorporated into the plasma. Even though the elasticity index agrees well with values reported in the literature for a-Si:C:H films deposited by PECVD (Guruvenket et al, 2010), the plastic deformation resistance found here is around 50 times lower. According to the Johnson analysis (Tsui et al, 1995), H 3 /E 2 , is proportional to the load at which the material starts deforming plastically under the action of a rigid sphere of radius r. Therefore, to obtain a material highly resistant to plastic deformation H should be high and E low, consistently with the H/E parameter.…”
supporting
confidence: 89%
“…H 3 /E 2 increases from 1.6 to 7.9 MPa as oxygen is incorporated into the plasma. Even though the elasticity index agrees well with values reported in the literature for a-Si:C:H films deposited by PECVD (Guruvenket et al, 2010), the plastic deformation resistance found here is around 50 times lower. According to the Johnson analysis (Tsui et al, 1995), H 3 /E 2 , is proportional to the load at which the material starts deforming plastically under the action of a rigid sphere of radius r. Therefore, to obtain a material highly resistant to plastic deformation H should be high and E low, consistently with the H/E parameter.…”
supporting
confidence: 89%
“…(Rao et al, 2010) (Guruvenket et al, 2010) 806 (Choudhury et al, 2010) (Gengenbach et al, 1999, Scheinmann, 1970) 836 851 Rao et al 2010) (Gengenbach et al, 1999) 956 Ricci et al, 2011, Choudhury et al, 2010 1020, 1130 Gengenbach et al, 1999, Fracassi et al, 2003 1257 (Gengenbach et al, 1999, Choudhury et al, 2010 (Gengenbach et al, 1999) 2961, 2839  C-H CH 3 and CH 2 (Gengenbach et al, 1999, Scheinmann, 1970 3588 Ricci et al, 2011, Choudhury et al, 2010 Table 1. Assignments of the bands in the infrared spectra of the films and their related groups.…”
Section: Resultsmentioning
confidence: 99%
“…8 Note that M c-w could be positive in cases where corrosion reactions act as lubricant and reduce wear. M c-w is relevant in the case of coated substrates, where liquid infiltration through pores and defects in coatings can lead to the reduction of tribological properties of substrate/coating systems [20][21][22].…”
Section: Protocols For Synergy Evaluationmentioning
confidence: 99%