2008
DOI: 10.1016/j.mejo.2008.01.036
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Structural, electrical and optical analysis of ITO thin films prepared by sol–gel

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Cited by 27 publications
(11 citation statements)
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“…The deposition of TCOs on the substrate can be made using several physical or chemical methods, such as spincoating [8], magnetron sputtering [9], chemical vapor deposition (CVD) [10], vacuum evaporation [11], reaction evaporation [12] and the sol-gel process [6,[13][14][15][16][17][18][19]. The sol-gel method has several advantages, including simplicity, low cost, easily controlled doping levels and feasible preparation of large area films [6].…”
Section: Introductionmentioning
confidence: 99%
“…The deposition of TCOs on the substrate can be made using several physical or chemical methods, such as spincoating [8], magnetron sputtering [9], chemical vapor deposition (CVD) [10], vacuum evaporation [11], reaction evaporation [12] and the sol-gel process [6,[13][14][15][16][17][18][19]. The sol-gel method has several advantages, including simplicity, low cost, easily controlled doping levels and feasible preparation of large area films [6].…”
Section: Introductionmentioning
confidence: 99%
“…Transparent conducting oxide films (TCOs) have been studied for many years due to their low resistivity [1] and high optical transparency [2] in the visible region. Among the available TCOs, SnO 2 films have been widely used as transparent conducting electrodes in many optoelectronic and electro-optic devices such as solar cells and flat panel displays.…”
Section: Introductionmentioning
confidence: 99%
“…Among these methods, we can cite the conventional e-beam evaporation [8], the reactive e-beam evaporation [9], the dc sputtering [10,11], the rf sputtering [12,13], the spray pyrolysis technique [14], sol-gel [15,16] and pulsed laser deposition [17]. These studies have shown that the physical properties of ITO films depend greatly on the method and conditions of deposition.…”
Section: Introductionmentioning
confidence: 99%