Structural characterization of CVD diamond films using Raman and ESR spectroscopy methods

Fabisiak, K.; Banaszak-Piechowska, Agnieszka; Kaczmarski, M.; Kozanecki, Marcin

doi:10.1016/j.optmat.2004.11.057

Cited by 40 publications

(20 citation statements)

References 16 publications

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“…The most popular methods are: microwave plasma CVD (MP CVD), hot filament CVD (HF CVD), radio frequency CVD (RF CVD), laser induced plasma (LIP) and flame methods [1].…”

Section: Introductionmentioning

confidence: 99%

Study of CVD diamond layers with amorphous carbon admixture by Raman scattering spectroscopy

Dychalska

Popielarski

Franków

et al. 2015

Materials Science-Poland

129

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Raman spectroscopy is a most often used standard technique for characterization of different carbon materials. In this work we present the Raman spectra of polycrystalline diamond layers of different quality, synthesized by Hot Filament Chemical Vapor Deposition method (HF CVD). We show how to use Raman spectroscopy for the analysis of the Raman bands to determine the structure of diamond films as well as the structure of amorphous carbon admixture. Raman spectroscopy has become an important technique for the analysis of CVD diamond films. The first-order diamond Raman peak at ca. 1332 cm −1 is an unambiguous evidence for the presence of diamond phase in the deposited layer. However, the existence of non-diamond carbon components in a CVD diamond layer produces several overlapping peaks in the same wavenumber region as the first order diamond peak. The intensities, wavenumber, full width at half maximum (FWHM) of these bands are dependent on quality of diamond layer which is dependent on the deposition conditions. The aim of the present work is to relate the features of diamond Raman spectra to the features of Raman spectra of non-diamond phase admixture and occurrence of other carbon structures in the obtained diamond thin films.

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“…The most popular methods are: microwave plasma CVD (MP CVD), hot filament CVD (HF CVD), radio frequency CVD (RF CVD), laser induced plasma (LIP) and flame methods [1].…”

Section: Introductionmentioning

confidence: 99%

Study of CVD diamond layers with amorphous carbon admixture by Raman scattering spectroscopy

Dychalska

Popielarski

Franków

et al. 2015

Materials Science-Poland

129

View full text Add to dashboard Cite

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“…highest hardness, highest known value of thermal conductivity at 300 K, wide band gap (∼5.5 eV), and broad optical transparency from deep ultraviolet to far infrared), polycrystalline diamond films have attracted increasing attention [1][2][3][4][5]. Since the properties of a diamond crystal depend on the crystallographic direction, it is important to understand the effect of film deposition parameters on the evolution of the crystallographic orientation distribution (texture) and microstructure [6][7][8][9][10][11][12][13][14][15]. For instance, in the field of mechanical properties and wear, it was observed that [100]-oriented films exhibit lower roughness and higher wear resistance than those in other crystallographic directions, which renders them suited for tribological applications [13] 1 .…”

Section: Introductionmentioning

confidence: 99%

A 3D tomographic EBSD analysis of a CVD diamond thin film

Liu

Raabe

Zaefferer

2008

Science and Technology of Advanced Materials

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We have studied the nucleation and growth processes in a chemical vapor deposition (CVD) diamond film using a tomographic electron backscattering diffraction method (3D EBSD). The approach is based on the combination of a focused ion beam (FIB) unit for serial sectioning in conjunction with high-resolution EBSD. Individual diamond grains were investigated in 3-dimensions particularly with regard to the role of twinning.

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“…2 and Table II). The presented Raman spectra of the diamond layers consist of sharp, narrow diamond peak at around 1332 cm −1 and broad G-band peaked at 1530-1560 cm −1 [6]. The Raman peaks (diamond and G-band) are superimposed on a broad luminescence background inclined at different angles.…”

Section: Methodsmentioning

confidence: 90%

Structural and Electrical Characterization of Undoped Diamond Layer Grown by HF CVD

et al. 2017

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The undoped diamond layers were prepared using hot filament chemical vapor deposition technique. The controlled variation of the deposition parameters resulted in the layers with varying amount of nondiamond impurities. Routine characterization of the layers was carried out using scanning electron microscopy, X-ray diffractometry, and the Raman spectroscopy. Detailed measurements of room temperature electrical conductivity (σ300), currentvoltage characteristics have yielded useful information about the electrical conduction mechanism in this interesting material. The σ300 and I−V characteristic measurements were done in sandwiched configuration taking care off the surface effects. The diamond shows room temperature dc conductivity reaching the values in the range of σ300 ≈ 0.1−1 µS/cm. The I−V characteristics in these layers show space charge limited conduction behavior with I ∼ V 2 in high voltage region. The obtained results are explained in terms of chemically adsorbed hydrogen on the surface of diamond layers, which is a source of acceptor states just above the top of valence band.

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Structural characterization of CVD diamond films using Raman and ESR spectroscopy methods

Cited by 40 publications

References 16 publications

Study of CVD diamond layers with amorphous carbon admixture by Raman scattering spectroscopy

Study of CVD diamond layers with amorphous carbon admixture by Raman scattering spectroscopy

A 3D tomographic EBSD analysis of a CVD diamond thin film

Structural and Electrical Characterization of Undoped Diamond Layer Grown by HF CVD

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