2000 International Semiconductor Conference. 23rd Edition. CAS 2000 Proceedings (Cat. No.00TH8486)
DOI: 10.1109/smicnd.2000.890210
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Structural and optoelectrical investigation of transparent and conductive ZnO thin films prepared by chemical vapor deposition

Abstract: Transparent and conductive ZnO thin films have been prepared by a method derived from chemical vapor deposition using Zn (CsH702)2 as Zn source. The deposited thin ZnO layers of -0,l pm thickness on Si and InP semiconductor substrates have been investigated with respect to crystalline phase by X ray diffraction (XRD), by AFM for surface morphology, spectrophotometric measurements in UV-VIS-NIR spectral range and optoelectrical measurements of ZnO/semiconductor heterostructures.

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Cited by 21 publications
(24 citation statements)
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“…The presence of TM ions in the host semiconductor leads to an exchange interaction between itinerant sp-band electrons or holes and the d-electron spins localized at the magnetic ions, resulting in versatile magnetic field induced functionalities. A number of investigations on the synthesis of ZnO nanoparticles have been reported in the literature including thermal decomposition, chemical vapor deposition, sol-gel, hydrothermal, spray pyrolysis, precipitation, vapor phase oxidation, thermal vapor transport and condensation [7][8][9][10][11][12]. Low temperature solution combustion synthesis is emerging as a promising technique for the preparation of nanopowders as it is simple, fast and cost effective, does not require high-temperature furnaces and complicated set-ups [13].…”
Section: Introductionmentioning
confidence: 99%
“…The presence of TM ions in the host semiconductor leads to an exchange interaction between itinerant sp-band electrons or holes and the d-electron spins localized at the magnetic ions, resulting in versatile magnetic field induced functionalities. A number of investigations on the synthesis of ZnO nanoparticles have been reported in the literature including thermal decomposition, chemical vapor deposition, sol-gel, hydrothermal, spray pyrolysis, precipitation, vapor phase oxidation, thermal vapor transport and condensation [7][8][9][10][11][12]. Low temperature solution combustion synthesis is emerging as a promising technique for the preparation of nanopowders as it is simple, fast and cost effective, does not require high-temperature furnaces and complicated set-ups [13].…”
Section: Introductionmentioning
confidence: 99%
“…Many techniques have been used to prepare ZnO nanomaterials: solgel, 11,12 chemical coprecipitation, 13,14 chemical vapor deposition, 15 metalorganic chemical vapor deposition, 16 spray pyrolysis, 17 hydrothermal synthesis, 18 and inverse microemulsion. 4a,4b,1921 Using these techniques, different particle shapes have been prepared: nanowires, nanorods, nanospheres, nanotubes, and flower-like structures.…”
mentioning
confidence: 99%
“…All the patterns showed peaks at 32. 9 and 34.5 , which were assigned to the Si (2 0 0) and ZnO (0 0 2) diffractions, respectively. No traces of Mg metal or oxides were detected, indicating that the wurtzite structure had not been modified by incorporating Mg atoms into the ZnO matrix.…”
Section: Methodsmentioning
confidence: 99%
“…[6][7][8] Various techniques, such as chemical vapor deposition, molecular beam epitaxy, pulsed laser deposition, thermal evaporation, spray pyrolysis, and sol-gel spin-coating have been used to prepare MZO thin films. [9][10][11][12][13][14] Sol-gel spin-coating has distinct advantages such as reproducibility and low cost, and it can be used to mass produce uniform large-area coatings. However, these advantages are only provided when MZO thin films are directly deposited onto substrates because large degrees of lattice mismatch and significant differences between the thermal expansion coefficients of films and substrates can generate residual stress and defects, which can deteriorate film crystallinity.…”
Section: Introductionmentioning
confidence: 99%