Structural and optical properties of a radio frequency magnetron-sputtered ZnO thin film with different growth angles

Ko, Ki-Han; Joung, Yeun-Ho; Choi, Won Seok; Park, Mungi; Lee, Jaehyung; Hwang, Hyun-Suk

doi:10.1186/1556-276x-7-55

Cited by 12 publications

(5 citation statements)

References 6 publications

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“…From literature we have studied that ZnO based thin films can be deposited by metal organic chemical vapor disposition, spray pyrolysis, Rf sputtering, sol-gel, molecular beam epitaxy, pulsed laser deposition etc [18][19]. Among these, we preferred pulsed laser deposition technique which has several advantages like thickness of thin films have been controlled by adjusting the laser fluence and pulse rate, uniform thin films can be deposited.…”

Section: Introductionmentioning

confidence: 99%

Structural, optical and electronic properties of Fe doped ZnO thin films

Singh

Devi

Dhar

et al. 2015

Superlattices and Microstructures

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Section: Introductionmentioning

confidence: 99%

Structural, optical and electronic properties of Fe doped ZnO thin films

Singh

Devi

Dhar

et al. 2015

Superlattices and Microstructures

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“…There were many papers about the fabrication and characterization of ZnO films in the past decades [ 6 - 8 ]. However, few reports presented the piezoelectric quality of ZnO film quantitatively.…”

Section: Introductionmentioning

confidence: 99%

Preparation and characterization of ZnO microcantilever for nanoactuation

Wang

Shen

et al. 2012

Nanoscale Res Lett

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Zinc oxide [ZnO] thin films are deposited using a radiofrequency magnetron sputtering method under room temperature. Its crystalline quality, surface morphology, and composition purity are characterized by X-ray diffraction [XRD], atomic force microscopy [AFM], field-emission scanning electron microscopy [FE-SEM], and energy-dispersive X-ray spectroscopy [EDS]. XRD pattern of the ZnO thin film shows that it has a high c-axis-preferring orientation, which is confirmed by a FE-SEM cross-sectional image of the film. The EDS analysis indicates that only Zn and O elements are contained in the ZnO film. The AFM image shows that the film's surface is very smooth and dense, and the surface roughness is 5.899 nm. The microcantilever (Au/Ti/ZnO/Au/Ti/SiO2/Si) based on the ZnO thin film is fabricated by micromachining techniques. The dynamic characterizations of the cantilever using a laser Doppler vibrometer show that the amplitude of the cantilever tip is linear with the driving voltage, and the amplitude of this microcantilever's tip increased from 2.1 to 13.6 nm when the driving voltage increased from 0.05 to 0.3 Vrms. The calculated transverse piezoelectric constant d31 of the ZnO thin film is -3.27 pC/N. This d31 is high compared with other published results. This ZnO thin film will be used in smart slider in hard disk drives to do nanoactuation in the future.

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“…There is a wide experimental evidence of the growth of 30° tilted ZnO films with the rf sputtering technique [12,13,14] or by PLD [15]. The 30° tilt angle represents a tradeoff between high structural quality of the currently grown films and quite good K 2 of both the first Love mode and the Rayleigh wave.…”

Section: Discussionmentioning

confidence: 99%

A Theoretical Study of Love Wave Sensors Based on ZnO–Glass Layered Structures for Application to Liquid Environments

Caliendo

Hamidullah

2016

Biosensors

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The propagation of surface acoustic Love modes along ZnO/glass-based structures was modeled and analysed with the goal of designing a sensor able to detect changes in the environmental parameters, such as liquid viscosity changes and minute amounts of mass supported in the viscous liquid medium. Love mode propagation was modeled by numerically solving the system of coupled electro-mechanical field equations and Navier–Stokes equations. The phase and group velocities and the attenuation of the acoustic wave propagating along the 30° tilted c-axis ZnO/glass structure contacting a viscous non-conductive liquid were calculated for different ZnO guiding layer thicknesses, added mass thicknesses, and liquid viscosity and density. The three sensor responses, i.e., the wave phase and group velocity, and attenuation changes are calculated for different environmental parameters and related to the sensor velocity and attenuation sensitivities. The resulted sensitivities to liquid viscosity and added mass were optimized by adjusting the ZnO guiding layer thickness corresponding to a sensitivity peak. The present analysis is valuable for the manufacture and application of the ZnO-glass structure Love wave sensors for the detection of liquid properties, such as viscosity, density and mass anchored to the sensor surface.

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Structural and optical properties of a radio frequency magnetron-sputtered ZnO thin film with different growth angles

Cited by 12 publications

References 6 publications

Structural, optical and electronic properties of Fe doped ZnO thin films

Structural, optical and electronic properties of Fe doped ZnO thin films

Preparation and characterization of ZnO microcantilever for nanoactuation

A Theoretical Study of Love Wave Sensors Based on ZnO–Glass Layered Structures for Application to Liquid Environments

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